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US 2003/0197446 A1Published application
MEMS device having a flexure with integral actuator
AssigneeHewlett-Packard Development Company, L.P.
InventorThomas Wayne Ives
Life of this patent
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Abstract
A micro-electro-mechanical device comprises a moveable mass, a frame for supporting the mass, and a flexure extending between the mass and the frame. The flexure includes an integral actuator for moving the mass member with respect to the frame.
Claims20
A micro-electro-mechanical device comprising:
- a moveable mass;
- a frame for supporting the mass;
- and
- a first flexure extending between the mass and the frame, wherein the first flexure includes an integral actuator for moving the mass with respect to the frame.
1 more element
A data storage module for a data storage device, the storage module comprising:
- a rotor having a plurality of data storage areas, the storage areas each being in one of a plurality of states to represent the data stored in that area;
- a frame;
- a first set of flexures suspending the rotor within the frame and permitting the rotor to move along a first axis;
- and
- a second set of flexures suspending the rotor within the frame and permitting the rotor to move along a second axis;
- and
- the flexures of the first and second sets of flexures having monolithic force elements along their length for flexing the flexures and moving the rotor with respect to the frame.
4 more elements
Dependencies are inferred from the claim text.