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US 2003/0197236 A1Published application
Off-axis silicon substrate for optimized optical coupling
AssigneeTriQuint Technology Holding Co.
InventorsJing-Hua He, Muhammad Arif, Rao Yelamarty, Hak Byun, Christina Arnold
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Abstract
An optical receiver having a silicon substrate with a top surface cleaved from a [100] silicon crystallographic plane and a reflector, and a photodetector coupled to the top surface of the silicon substrate, the photodetector being adapted to receive an incoming signal from a fiber.
Claims20
An optical receiver, comprising:
- a silicon substrate, said silicon substrate having a top surface cleaved from a [100] silicon crystallographic plane and a reflector extending from said top surface;
- and
- a photodetector coupled to said top surface of the silicon substrate, said photodetector being adapted to receive an incoming signal from a fiber.
A method for making an optical receiver comprising:
- cleaving a silicon substrate having a top surface along a [100] silicon crystallographic plane by about 5.7° to about 9.7° to form an off-axis top surface of an optical sub-assembly;
- etching from said off-axis top surface along a [111] silicon crystallographic plane to form a reflector having an angle of about 45° to about 49° relative to said off-axis top surface.
An optical receiver, comprising:
- a housing adapted to receive a distal end of a fiber;
- an optical sub-assembly coupled to the housing, the optical sub-assembly having a silicon top surface and a reflector extending from said top surface;
- and
- a photodetector coupled to said top surface of said optical sub-assembly;
- wherein a light beam emanating from said fiber is reflected off of said reflector onto said photodetector;
- and
- said top surface is cleaved from a [100] silicon crystallographic plane.
4 more elements
A silicon optical sub-assembly comprising:
- a top surface cleaved about 5.7° to about 9.7° from a [100] silicon crystallographic plane;
- and
- a reflector etched along a [111] silicon crystallographic plane from said top surface.
Dependencies are inferred from the claim text.