Method for manufacturing semiconductor device, semiconductor device, electro-optical device, and electronic apparatus

A method of manufacturing a semiconductor device having a thin-film circuit constructed by arranging a plurality of unit circuits having thin-film elements on an insulating substrate, comprising:

• forming a plurality of seed portions to be seeds in crystallizing a semiconductor film on said insulating substrate;
• forming the semiconductor film on said insulating substrate on which said seed portions have been formed;
• crystallizing said semiconductor film by carrying out heating;
• and
• forming said thin-film circuit in said semiconductor film on which said heating has been carried out, said plurality of seed portions being formed to have a pitch n times an array pitch of the respective thin-film elements included in each of said unit circuits.

A semiconductor device, comprising:

• a thin-film circuit, including:
• an insulating substrate;
• and
• a plurality of unit circuits having thin-film elements arranged on the insulating substrate;
• said insulating substrate defining step portions formed to have a pitch n times an array pitch of said plurality of unit circuits;
• and
• each of said plurality of unit circuits being formed by a substantially monocrystalline semiconductor film by carrying out heating on said semiconductor film formed on said insulating substrate to crystallize said semiconductor film using said step portions as seeds.

A semiconductor device, comprising:

• a thin-film circuit, including:
• an insulating substrate;
• and
• a plurality of unit circuits having thin-film elements arranged on the insulating substrate;
• said insulating substrate defining step portions formed to have a pitch n times an array pitch of the respective thin-film elements included in said unit circuits;
• and
• said thin-film elements being formed by a substantially monocrystalline semiconductor film by carrying out heating on said semiconductor film formed on said insulating substrate to crystallize said semiconductor film using said step portions as seeds.