Mercury-containing copper oxide superconductor film, manufacturing apparatus thereof and manufacturing process thereof

Abstract

The objective of this invention is to provide a mercury-containing copper oxide superconductor film with a large area and a reduced amount of hetero-phase precipitate as an impurity, as well as an apparatus and a process for safely producing the film in a large scale; for this purpose, an apparatus for forming a film of this invention comprises a pressure vessel 1 (pressurized atmosphere furnace) equipped with a port 11 for introducing an external gas atmosphere to the furnace wall 3 and a mercury feeder 10 for controlling a pressure of the gas atmosphere independently of the pressure vessel 1 by generating a mercury-containing gas, the mercury feeder 10 introduces a mercury-containing gas into the pressure vessel 1 via the port 11, and, there is a metal seal gate valve 16 between the pressure vessel 1 and the mercury feeder 10.

Dependencies are inferred from the claim text.