Back to results
US 2003/0197141 A1Published application
Vacuum regulating valve
AssigneeSMC Corporation
InventorMasao Kajitani
Life of this patent
Estimating the term…
Abstract
A chamber port to which a vacuum chamber is connected and a pump port to which a vacuum pump Is connected are formed on a valve body of a vacuum regulating valve. A valve plug includes a plate and a nose which is connected to the plate by screw members, and closes the chamber port by a pressure fluid. The maximum outer diameter of the nose is smaller than the inner circumferential diameter of the chamber port. The nose is detached through the chamber port.
Claims9
A vacuum regulating valve comprising;
- a valve body which has a first port and a second port connected to an upstream side and a downstream side of a fluid passage, respectively, and which has a communication passage between said first port and said second port;
- a valve plug which opens/closes said communication passage by being displaced in an axial direction of said valve body by a pressure fluid:
- and
- a nose provided on said valve plug and having a circumferential surface facing an inner wall surface of said valve body for constituting said communication passage,
- wherein said nose has an outer circumferential diameter which is smaller than an inner circumferential diameter of said inner wall surface, so that said nose is detachable from said valve plug through said first port connected to a vacuum chamber.
2 more elements
Dependencies are inferred from the claim text.