Loading patent…
AssigneeIndustrial Technology Research Institute
InventorsStory Huang, Szu-Hui Lee, Yvonne Chang, Hung-I Lin, Jia-Bin Hsu, Chun-Hsien Liu
Estimating the term…
A position-, speed- and force-controllable chip accessing apparatus comprises a fixing seat, a rotational direction moving device, a linear direction moving device, and a position sensing device, characterized in that a flexible positioning means is provided at a proper central site of said fixing seat and is screw fixed with said rotational direction moving device; one side of said rotational direction moving device is coupled with said linear direction moving device, while the other side of said rotational direction moving device is coupled with said position sensing device screw; and that by measuring with a speed sensor and a position sensing device on said linear direction moving device, the control of the force, speed and moving distance can be achieved.
A position-, speed- and force-controllable chip accessing apparatus, comprises a fixing seat, a rotational direction moving device, a linear direction moving device, and a position sensing device, characterized in that:
Dependencies are inferred from the claim text.
From the US filing history. Foreign family members aren’t listed.
Backward citations are indexed for grants only.
Drawings are temporarily unavailable. Open the PDF at USPTO
For supporting or gripping: using vacuum or suction, e.g. Bernoulli chucks
Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members: stationary or movable…
Devices for removing chips: by sucking
Handling or holding of wafers, substrates or devices during manufacture or treatment thereof: for positioning, orientation or alignment
Term end not estimated
1. Field of the Invention
The invention relates to a position-, speed- and force-controllable chip accessing apparatus, and particularly, to a position-, speed- and force-controllable chip accessing apparatus having its force controlled and its speed measured by VCM and its displacement controlled by an optical rule.
2. Description of the Prior Art
The drawings disclose an illustrative embodiment of the present invention, which serves to exemplify the various advantages and objects hereof, and are as follow:
FIG. 1 is a three-dimensional out looking view of the position-, speed- and force-controllable chip accessing apparatus according to the invention;
FIG. 2 is a three-dimensional exploded view of the position-, speed- and force-controllable chip accessing apparatus according to the invention;
SYMBOLS OF MAIN ELEMENTS 1 1 Fixing seat 11 Flexible positioning means 111 Base 112 Round screw 113 Spring 114 Connecting element 115 Joining plate 116 Sliding block 117 Guiding track 2 Rotational direction moving device 21 Servo motor 211 Shaft coupling element 22 Chip sucker 221 Bearing 222 Rotational shaft 223 Suction hole 224 Suction chamber 225 Sucking port 226 Air guiding hole 2261 Vent 227 Rubber gasket 228 Locking element 229 Suction channel 3 Linear direction moving device 31 Driving means 311 ⊥-shaped yoke 3111 Extending long edge 312 Coil 3131 ┐-shaped yoke 314 Magnet 32 Speed sensor 321 Protruding block 322 Coil 323 Speed sensing-yoke 3231 Leg 3232 Baffle 324 Speed sensing magnet 33 Connecting element 4 Position sensing device 41 Optical rule 42 Sensor 43 Base 5 Screw 6 Conventional chip accessing apparatus 61 Driving assembly 62 Chip sucker 63 Sucking port
Referring to FIG. 1 and 2, showing the three-dimensional out looking and exploded view, respectively, of the position-, speed- and force-controllable chip accessing apparatus according to the invention, which comprises essentially:
a fixing seat 1 (FIG. 3 ), provided with a flexible positioning means 11 at a proper central site on the right side of said fixing seat; wherein said flexible positioning means 11 comprises a base 111 having a spring 113 on each side thereof; a round screw 112 is provided above each of said spring 113; each of these two round screw is hold through a ┐-shaped connecting element 114 provided above each of these two round screw 112; each of these two connecting element 114 is fixed on said fixing seat 1 with a screw 5; an joining plate 115 is provided protrusive wise on a central area of said base 111 and fixed with said base each other; a sliding block 116 is fixed with a screw on the rear side of said joining plate; and said sliding block 116 is fit in a guiding track 117 joined with said base 1;