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AssigneeMurata Manufacturing Co., Ltd.
InventorsToshiaki Kaji, Yoshimasa Yoshino, Suetake Omiya, Koichi Yamada
Estimating the term…
A method of manufacturing a piezoelectric ceramic device having excellent piezoelectric characteristics and high reliability is described. The method includes the steps of coating conductive paste containing Ag as a main component on each of a plurality of ceramic green sheets each containing a piezoelectric ceramic material, laminating the plurality of ceramic green sheets to form a laminate, and burning the laminate under an atmospheric condition in which the oxygen concentrations in a heating process and a retention process are about 21% by volume or more, and the oxygen concentration in a cooling process is about 0.05% by volume to 3% by volume.
A method of manufacturing a monolithic piezoelectric ceramic device, comprising burning a laminate comprising a plurality of ceramic green sheets of piezoelectric ceramic material and containing a conductive paste comprising Ag sandwiched between at least one pair of said sheets by a process which comprises heating, retention at elevated temperature and cooling, wherein
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Layered products essentially comprising ceramics
Containing also titanium oxides or titanates: based on lead zirconates and lead titanates , e.g. PZT
Based on lead zirconates and lead titanates , e.g. PZT: containing also other lead compounds
Based on oxide ceramics: based on vanadium, niobium, tantalum, molybdenum or tungsten oxides or solid solutions thereof with other oxides, e.g.…
Term end not estimated
1. Field of the Invention
The present invention relates to a method of manufacturing a piezoelectric ceramic device used for a piezoelectric resonator, a piezoelectric actuator, a piezoelectric filter, a piezoelectric buzzer, a piezoelectric transformer, etc. Particularly, the present invention relates to a method of manufacturing a piezoelectric ceramic device comprising internal electrodes each comprising an alloy composed of Ag as a main component.
2. Description of the Related Art
FIG. 1 is a perspective view showing a monolithic piezoelectric actuator according to an embodiment of the present invention;
FIG. 2 is a sectional view of the monolithic piezoelectric actuator shown in FIG. 1, taken along line a-b in FIG. 1;
FIG. 3 is a perspective view showing an example of an ink-jet monolithic piezoelectric device to which the present invention can be applied;
A method of manufacturing a monolithic piezoelectric actuator as an example of a monolithic piezoelectric ceramic device of the present invention will be described in detail below with reference to the drawings and several embodiments. First Embodiment As starting raw materials, Pb3O4, TiO2, ZrO2, and SrCO3 are prepared. Then, the starting raw materials are weighed so that a piezoelectric ceramic composition Pb0.98Sr0.02(Zr0.45Ti0.55)O3 is obtained, and the resultant mixture is wet mixed by a ball mill. The mixture is then dehydrated, dried, calcined at a temperature of 800° C. for 2 hours, and then ground to obtain a calcined powder.
Then, additives such as an acrylic organic binder, an organic solvent and a plasticizer are added to the calcined powder, and then the resultant mixture is wet mixed by the ball mill to obtain slurry.
The thus-obtained slurry is formed into a sheet by the doctor blade method to prepare a ceramic green sheet having a thickness of about 40 μm.