Wet processing bath and fluid supplying system for liquid crystal display manufacturing equipment
AssigneeDisplay Manufacturing Service Co., Ltd.
InventorsYong-Seok Park, Sang-Ho Kim, Sok-Joo Lee
Life of this patent
Estimating the term…
Abstract
A fluid supplying system for LCD manufacturing equipment and a wet processing bath therefor are provided. The fluid supplying system includes a bath united with storage tank in which a fluid collection bath is united with a fluid storage tank. The storage tank having a small size is individually provided to each bath. Further, the body of the wet processing bath is made of a durable material with a chemical resistive material coated thereon. Therefore, the wet processing unit can be widely used regardless of the different types of chemical fluid.
Claims16
A fluid supplying system for LCD (liquid crystal display) manufacturing equipment, comprising:
- a bath united with storage tank including a process unit and/or a fluid storage tank united with the bath;
- a fluid supplement unit supplementing fluid that is adhered to substrates within the process unit and discharged together with the substrates outside of the bath united with storage tank;
- a pump supplying fluid stored in the bath united with storage tank and the fluid supplemented from the fluid supplement unit;
- and
- a plurality of pipelines connecting the bath united with storage tank, including the process unit, and the fluid supplement unit to the pump.
A wet processing bath for LCD (liquid crystal display) manufacturing equipment, comprising:
- a bath body;
- a process unit included in the bath body, in which a predetermined process is performed;
- and
- an outlet for discharging fluid within the bath body outside of the bath, and
- wherein the bath body is made of a durable material and a chemically resistive material is coated on the surface of the durable material.
A fluid supplying system for LCD (liquid crystal display) manufacturing equipment, comprising:
- a bath united with storage tank including a process unit and a fluid storage tank united with the bath;
- a fluid supplement unit supplementing fluid that is adhered to substrates within the process unit and discharged together with the substrates outside of the bath united with storage tank;
- a pump supplying fluid stored in the bath united with storage tank and the fluid supplemented from the fluid supplement unit;
- and
- a plurality of pipelines connecting the bath united with storage tank, including the process unit, and the fluid supplement unit to the pump, and
- wherein the bath united with storage tank includes a bath body;
- a process unit included in the bath body, in which a predetermined process is performed;
- and an outlet for discharging fluid within the bath body outside of the bath, and the bath body is made of a durable material and a chemically resistive material is coated on the surface of the durable material.
Dependencies are inferred from the claim text.