Process modules for transport polymerization of low epsilon thin films
AssigneeDielectric Systems, Inc.
InventorsChung J. Lee, Oanh Nguyen, Wei Shiang Charles Lee, Michael Solomensky, Atul Kumar, James Yu Chung Chang, Binh Nguyen
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Abstract
A Process Module (“PM”) is designed to facilitate Transport Polymerization (“TP”) of precursors that are useful for preparations of low Dielectric Constant (“∈”) films. The PM consists primarily of a Material Delivery System (“MDS”) with a high temperature Vapor Phase Controller (“VFC”), a TP Reactor, a Treatment Chamber, a Deposition Chamber and a Pumping System. The PM is designed to facilitate TP for new precursors and for film deposition and stabilization processes.
Claims67
A process module for transport-polymerization (“TP”) of a precursor comprising:
- (a) a material delivery subsystem adapted to deliver the precursor to a TP reactor;
- (b) the TP reactor adapted to receive the precursor and to generate an intermediate;
- (c) a deposition chamber designed to produce a polymer film onto a substrate under a vacuum;
- and
- (d) a substrate pre- and post-treatment chamber designed to remove contamination from the substrate and stabilize the polymer film on the substrate under the vacuum.
A method for cleaning a deactivated reactor having an organic residue comprising:
- (a) oxidizing the organic residues inside the deactivated reactor;
- and
- (b) purging the TP reactor with a gas.
Dependencies are inferred from the claim text.