Padded clamp ring with edge exclusion for deposition of thick AlCu/AlSiCu/Cu metal alloy layers

A clamp ring for securing a substrate comprising:

• a body;
• one or more substrate contacting surfaces projecting from the body;
• and
• an edge exclusion lip projecting from the body, the lip sized and adapted to project over an edge of any substrate beneath the one or more contacting surfaces, the lip spaced from the substrate at an innermost edge of the lip by a first distance and spaced from the substrate at the substrate edge by a second distance smaller than the first distance,
• wherein at least the second distance is selected based on a material to be deposited on substrates secured by the clamp ring.

A clamp ring for securing a substrate comprising:

• a body;
• one or more substrate contacting surfaces projecting from the body;
• and
• an edge exclusion lip projecting from the body, the lip sized and adapted to project over an edge of any substrate beneath the one or more contacting surfaces, the lip spaced from the substrate at an innermost edge of the lip by a first distance and spaced from the substrate at the substrate edge by a second distance smaller than the first distance,
• wherein at least the second distance is selected based on a thickness of layers to be deposited on substrates secured by the clamp ring.

A clamp ring for securing a substrate comprising:

• a body;
• one or more substrate contacting surfaces projecting from the body;
• and
• an edge exclusion lip projecting from the body, the lip sized and adapted to project over an edge of a substrate secured by the clamp ring, the lip including a bottom surface extending over the substrate edge toward an innermost edge of the lip,
• wherein at least a portion of the bottom surface is sloped from a first height at one end closest to the innermost edge of the lip to a second height smaller than the first height at an other end closest to the substrate edge.

A clamp ring comprising:

• a roof having upper and lower surfaces;
• at least one substrate contacting surface extending downwardly from the lower roof surface;
• and
• a lip forming an inner terminus of the roof, wherein the lip is sized and adapted to extend inwardly over the edge of a substrate while remaining vertically spaced from the substrate, the lip having a variable lower surface comprising at least first and second lower surfaces, the first surface disposed inwardly from the second surface,
• wherein a height of at least the second lower surface is selected to minimize accumulation over time of deposited material on a sidewall adjacent the second lower surface resulting from depositing the material to a desired thickness on each of a plurality of substrates sequentially secured by the clamp ring.