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AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsShunpei Yamazaki, Kunitaka Yamamoto, Masaaki Hiroki, Takeshi Fukunaga
Estimating the term…
There is provided a thin film forming apparatus for precisely forming a film of an organic EL material made of a polymer without a positional deviation and at a high throughput. A pixel portion is divided into a plurality of pixel lines by banks, and a head portion of the thin film forming apparatus is moved along the pixel lines, so that a coating liquid (R), a coating liquid (G), and a coating liquid (B) can be applied respectively in a stripe shape at the same time. Then, luminescent layers emitting lights of respective colors of red, green and blue can be formed by heating these coating liquids.
A thin film forming apparatus comprising:
A thin film forming apparatus comprising:
A thin film forming apparatus comprising:
A thin film forming apparatus comprising:
Dependencies are inferred from the claim text.
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From the US filing history. Foreign family members aren’t listed.
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Using liquid deposition, e.g. spin coating: using printing techniques, e.g. ink-jet printing or screen printing
Using printing techniques, e.g. ink-jet printing or screen printing: using ink-jet printing
Active-matrix OLED [AMOLED] displays: pixel-defining structures or layers, e.g. banks
Devices specially adapted for multicolour light emission: comprising red-green-blue [RGB] subpixels
Term end not estimated
1. Field of the Invention
The present invention relates to a thin film forming apparatus used for fabricating an EL element having a structure in which a luminescent material capable of generating EL (Electro Luminescence), particularly, a luminescent organic material (hereinafter referred to as organic EL material) is placed between an anode and a cathode.
2. Description of the Related Art
In the accompanying drawings:
FIGS. 1A and 1B are views showing a thin film forming apparatus;
FIGS. 2A to 2C are views showing a coating step of an organic EL material:
In the following, an embodiment mode of the invention will be described. As shown in FIG. 2A, when the pixel portion 111, the source side driving circuit 112, the gate side driving circuit 113 comprises TFTs on the substrate 110, the stripe-shaped banks 121 are formed along the source wiring lines (wiring lines connecting the source side driving circuit 112 to the pixel portion 111 and transmitting information signal to the switching TFT of the pixel portion).
Next, the coating liquid (R) 114a, the coating liquid (G) 114b, and the coating liquid (B) 114c, which is to become luminescent layers, are prepared. Each of the coating liquids 114a to 114c is mainly formed by dissolving a high molecular organic EL material in a solvent. As a typical high molecular organic EL material, polyparaphenylene vinylene (PPV) system, polyvinylcarbazole (PVK) system, polyfluorene system or the like can be cited.
Although various types exist as the PPV system organic EL materials, for example, molecular formulas [Compound 1] and [Compound 2] as indicated in the attached sheet have been announced. (H. Shenk, H. Becker, O. Gelsen. E. Kluge. W. Kreuder, and H. Spreitzer, “Polymers for Light Emitting Diodes”, Euro Display, Proceedings, 1999, p. 33-37)