Increasing the dynamic range of a MEMS gyroscope

#The present invention relates generally to microelectromechanical system (MEMS) gyroscopes, and more particularly, relates to increasing the dynamic range of a MEMS gyroscope.

#Microelectromechanical systems (MEMS) integrate electrical and mechanical devices on the same silicon substrate using microfabrication technologies. The electrical components are fabricated using integrated circuit processes, while the mechanical components are fabricated using micromachining processes that are compatible with the integrated circuit processes. This combination makes it possible to fabricate an entire system on a chip using standard manufacturing processes.

#One common application of MEMS is the design and manufacture of sensor devices. The electro-mechanical portion of the device provides the sensing capability, while the electronic portion processes the information obtained by the electro-mechanical portion. One example of a MEMS sensor is a MEMS gyroscope.

#Presently preferred embodiments are described below in conjunction with the appended drawing figures, wherein like reference numerals refer to like elements in the various figures, and wherein:

#FIG. 1 is a plan view of a MEMS gyroscope, according to an exemplary embodiment;

#FIG. 2 is a plan view of a MEMS gyroscope system, according to an exemplary embodiment;

#FIG. 1 shows a plan view of a microelectromechanical system (MEMS) gyroscope 100 according to an exemplary embodiment. While FIG. 1 shows the MEMS gyroscope 100 as a tuning fork gyroscope, other MEMS vibratory gyroscopes that use a Coriolis acceleration to detect rotation, such as an angular rate sensing gyroscope, may also be used. The MEMS gyroscope 100 may be formed on a substrate and may include at least one proof mass 102a, 102b; a plurality of support beams 104; at least one cross beam 106a, 106b; at least one motor drive comb 108a, 108b; at least one motor pickoff comb 110a, 110b; at least one sense plate 112a, 112b; and at least one anchor 114a, 114b.

#The at least one proof mass 102a, 102b may be any mass suitable for use in a MEMS gyroscope system. In a preferred embodiment, the at least one proof mass 102a, 102b is a plate of silicon. Other materials that are compatible with micromachining techniques may also be employed. FIG. 1 shows two proof masses; however, one or more proof masses may be employed.

#The at least one proof mass 102a, 102b may be located substantially between the at least one motor drive comb 108a, 108b and the at least one motor pickoff comb 110a, 110b. The at least one proof mass 102a, 102b may contain a plurality of comb-like electrodes extending towards both the at least one motor drive comb 108a, 108b and the at least one motor pickoff comb 110a, 110b. While the at least one proof mass 102a, 102b has ten electrodes as depicted in FIG. 1, the number of electrodes on the at least one proof mass 102a, 102b may be more or less than ten.