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US 2003/0196477 A1Published application
Acoustic wave sensor apparatus, method and system using wide bandgap materials
AssigneeWayne State University
InventorsGregory W. Auner, Feng Zhong, Chantelle Hughes, Gina Shreve, Hao Ying
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Abstract
An acoustic wave sensor to detect an analyte, the sensor comprising a piezoelectric material including a wide bandgap semiconductor material grown using plasma source molecular beam epitaxy.
Claims72
An acoustic wave sensor to detect an analyte, comprising:
- a piezoelectric material including a wide bandgap semiconductor material grown using plasma source molecular beam epitaxy.
A method for operating an acoustic wave sensor, the method comprising:
- generating an acoustic wave;
- directing the acoustic wave to transverse a micro-machined arrangement;
- detecting a resonating frequency of the micro-machined arrangement;
- and
- determining a presence of an analyte based on the detected resonating frequency, wherein the analyte contains a target structure that binds to an immobilization layer of the micro-machined arrangement.
2 more elements
A method for making an acoustic wave sensor, the method comprising:
- ultrasonically cleaning a substrate;
- etching the substrate in a heated acid mixture to remove damage caused by a mechanical polishing;
- rinsing the substrate in de-ionized water and methanol;
- loading the substrate into a plasma source molecular beam epitaxy growth chamber;
- preheating the substrate;
- and
- raising a temperature to grow a layer on the substrate.
4 more elements
A method of fabricating acoustic wave sensors employing a photolithography process, the method comprising:
- coating a bottom layer with a photo-resistant coating;
- placing a mask before the photo-resistant coating;
- exposing the coated bottom layer to UV;
- allowing the photo-resistant layer to polymerize;
- applying a metal on the polymerized photo-resistant layer;
- and
- removing the polymerized photo-resistant layer.
4 more elements
A method for operating an acoustic wave sensor, the method comprising:
- generating an acoustic wave;
- directing the acoustic wave to transverse a resonating arrangement including a wide bandgap material grown using plasma source molecular beam epitaxy;
- detecting a resonating frequency of the resonating arrangement;
- and
- determining a presence of an analyte based on the detected resonating frequency, wherein the analyte contains a target structure that binds to an immobilization layer of the resonating arrangement.
2 more elements
Dependencies are inferred from the claim text.