Apparatus and method for photonic waveguide fabrication
OwnerMichael A. McCov, James W. Zimmermanninventors
Life of this patent
Estimating the term…
Abstract
A photonic fabrication apparatus for making a waveguide in a glass substrate having a metal mask defining a region for the waveguide. The apparatus includes a molten salt, and a sacrificial anodic reaction material, in contact with the salt, that reacts with one or more contaminants in the salt. Also described is a salt-melt ion-exchange system having a chemical secondary reaction in the salt melt to prevent or reduce any primary reaction at or near the waveguide that would otherwise roughen sides of the waveguide and/or the surface over the waveguide.
Claims38
An apparatus for making a waveguide in a glass substrate, the glass substrate having a metal mask defining a region for the waveguide, the apparatus comprising:
- a molten salt;
- and
- a reaction material, in contact with the salt, that reacts with one or more contaminants in the salt.
An apparatus for making a waveguide in a glass substrate, the glass substrate having a metal mask defining a region for the waveguide, the apparatus comprising:
- a molten salt;
- and
- a reaction material, in contact with the salt, that catalyzes a reaction with one or more contaminants in the salt.
A method for forming a waveguide, defined by a metal mask, into a glass substrate, the method comprising:
- melting an ion-exchange salt;
- reacting an anodic material with one or more dissolved contaminants in the melted salt, that creates a solid;
- and
- diffusing ions from the ion-exchange salt into the glass substrate.
A method comprising:
- melting an ion-exchange salt;
- reacting an anodic material with one or more dissolved contaminants in the melted salt, that creates a solid;
- and
- diffusing ions from the ion-exchange salt into a glass substrate.
A method comprising:
- melting an ion-exchange salt;
- catalyzing a reaction that includes one or more dissolved contaminants in the melted salt;
- and
- diffusing ions from the ion-exchange salt into a glass substrate.
An apparatus for processing a glass substrate having a metal mask, the apparatus comprising:
- a molten salt;
- a mechanism that introduces the glass substrate into the molten salt;
- and
- sacrificial anodic means in the molten salt for improving a quality of a waveguide defined by the metal mask and formed in the glass substrate.
An apparatus for processing a waveguide in a glass substrate, wherein a first reaction would degrade an optical performance characteristic of the waveguide, the apparatus comprising:
- a molten salt;
- a mechanism that introduces the glass substrate into the molten salt;
- and
- a second chemical reaction in the molten salt for improving the optical performance characteristic of a waveguide formed in the glass substrate.
Dependencies are inferred from the claim text.