Inspection condition setting program, inspection device and inspection system

A program for setting inspection conditions that is executed for setting inspection conditions of an inspection device that detects the position of particles or deformed patterns present in or on a subject of inspection, wherein the program executes:

• circuit layout reading processing of reading circuit layout data formed on the subject of inspection;
• designated circuit block region coordinates extraction processing in which the coordinates of designated circuit block regions are extracted from the circuit layout data that has thus been read in the circuit layout reading processing;
• and
• inspection region registration processing in which the coordinates of circuit block regions that have thus been extracted by the designated circuit block region coordinates extraction processing are registered as inspection regions of the inspection device.

A program for setting inspection conditions that is executed for setting inspection conditions of an inspection device that detects the position of particles or deformed patterns present in or on a subject of inspection, wherein the program executes:

• circuit layout reading processing of reading circuit layout data formed on the subject of inspection;
• sparse region coordinates extraction processing in which the coordinates of regions where the circuit pattern is sparse are extracted from the circuit layout data that has thus been read in the circuit layout reading processing;
• and
• non-inspection region coordinates registration processing in which the coordinates of the sparse regions that have thus been extracted by the sparse region coordinates extraction processing are registered as non-inspection regions of the inspection device.

An inspection device comprising:

• a calculation unit that extracts the coordinates of repeated pattern regions in a circuit layout from circuit layout data formed on the subject of inspection;
• a storage unit that registers as inspection regions the coordinates of this extracted repeated pattern regions;
• and
• an inspection unit that reads this inspection regions that have been registered in the storage section and detects the position of particles or deformed patterns present in or on the inspection subject.

An inspection device comprising:

• a calculation unit that extracts the coordinates of a designated circuit block regions from circuit layout data formed on a subject of inspection;
• a storage unit that registers as an inspection region the coordinates of these extracted circuit block regions;
• and
• an inspection unit that reads these inspection regions registered in the storage section and detects the positions of particles or deformed patterns present in or on the subject of inspection.

An inspection device comprising:

• a calculation unit that extracts the coordinates of regions where the circuit patterns are sparse from circuit layout data formed on a subject of inspection;
• a storage unit that registers as a non-inspection regions the coordinates of this extracted sparse regions;
• and
• an inspection unit that reads this non-inspection regions registered in the storage section and detects the position of particles or deformed patterns present in or on the subject of inspection.