Semiconductor test system with easily changed interface unit

#This invention relates generally to manufacture of semiconductor devices and more particularly to interface units used to interface a test system to a device under test.

#In the manufacture of semiconductor devices, the semiconductor devices are usually tested at least once during the manufacturing operation. The results of the testes are used to control further processing in the semiconductor manufacturing operation. The testing might be used to separate properly operating devices from devices that fail to operate properly. However, testing can also be used to feed back data to other stages in the manufacturing operation to make adjustments that increase the yield of properly operating devices. In other instances, the test results are used to sort devices into performance categories. For example, a device might operate at data rates of 200 MHz, but not operate at data rates of 400 MHz. Following testing, the device might be classified as a 200 MHz device and sold at a lower price than a 400 MHz device.

#A testing stage might also be used to make physical changes to the device under test. Many semiconductor devices with memories contain redundant elements. If defective memory cells are discovered during testing, the semiconductor device might be sent to a repair station, such as a laser repair station, where connections on the device are rearranged to disconnect the faulty cells and connect redundant elements in their places.

#The invention will be better understood by reference to the following more detailed description and accompanying drawings in which

#FIG. 1 is a sketch of a handler incorporating a DIB changer according to the invention;

#FIG. 2 is sketch of the DIB changer of FIG. 1 in greater detail;

#FIG. 1 shows a material handling unit suitable for use in a semiconductor manufacturing operation. Here, a handler 100 is illustrated. Handler 100 moves packaged parts to a test system (310, FIG. 3).

#Handler 100 includes an interface area 102, where handler 100 interfaces to a test system. The interface area of a handler typically includes mechanical alignment and support structures so that a tester may be docked to the handler. Here, interface area 102 falls in a vertical plane. Alignment features 104 are shown for aligning handler 100 and the tester.

#Preferably, the alignment features create a kinematic coupling as described in U.S. Pat. No. 5,821,764, entitled “Interface Apparatus for Automatic Test Equipment,” which is hereby incorporated by reference. The interface apparatus described in this patent aligns the tester and the handler. In addition, that interface apparatus allows a force to be generated to pull the tester towards the handler and hold it in position.