Semiconductor constructions and methods of forming semiconductor constructions
AssigneeMicron Technology, Inc.
InventorJoel A. Drewes
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AssigneeMicron Technology, Inc.
InventorJoel A. Drewes
Estimating the term…
The invention includes a method of forming a semiconductor construction, such as an MRAM construction. A block is formed over a semiconductor substrate. First and second layers are formed over the block, and over a region of the substrate proximate the block. The first and second layers are removed from over the block while leaving portions of the first and second layers over the region proximate the block. At least some of the first layer is removed from under the second layer to form a channel over the region proximate the block. A material, such as a soft magnetic material, is provided within the channel. The invention also includes semiconductor constructions.
A method of forming a semiconductor construction, comprising:
A method of forming a semiconductor construction, comprising:
A method of forming a magnetoresistive memory device, comprising:
A method of forming a magnetoresistive memory device, comprising:
A magnetoresistive memory construction, comprising:
A magnetoresistive memory construction, comprising:
Dependencies are inferred from the claim text.
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Magnetic memory devices
Using elements in which the storage effect is based on magnetic spin effect: details concerning the memory cell structure, e.g. the layers of the…
Galvanomagnetic devices: manufacture or treatment
Galvanomagnetic devices: magnetoresistive devices
Term end not estimated
The invention pertains to semiconductor constructions and methods of forming semiconductor constructions. In particular applications, the invention pertains to magnetoresistive memory devices, and methods of forming such devices.
Magnetic random access memory (MRAM) devices are showing increasing promise for utilization as memory storage devices of the future. MRAM is a type of digital memory in which digital bits of information comprise alternative states of magnetization of magnetic materials in memory cells. The magnetic materials can be thin ferromagnetic films. Information can be stored and retrieved from the memory devices by inductive sensing to determine a magnetization state of the devices, or by magnetoresistive sensing of the magnetization states of the devices. It is noted that the term “magnetoresistive device” can be utilized to characterize a memory device and not the access device, and accordingly a magnetoresistive device can be accessed by, for example, either inductive sensing or magnetoresistive sensing methodologies.
A significant amount of research is currently being invested in magnetic digital memories, such as, for example, MRAM's, because such memories are seen to have significant potential advantages relative to the dynamic random access memory (DRAM) components and static random access memory (SRAM) components that are presently in widespread use. For instance, a problem with DRAM is that it relies on electric charge storage within capacitors. Such capacitors leak electric charge, and must be refreshed at approximately 64-128 millisecond intervals. The constant refreshing of DRAM devices can drain energy from batteries utilized to power the devices, and can lead to problems with lost data since information stored in the DRAM devices is lost when power to the devices is shut down.
Preferred embodiments of the invention are described below with reference to the following accompanying drawings.
FIG. 1 is a diagrammatic, cross-sectional view of a fragment illustrating a prior art MRAM construction.
FIG. 2 is a diagrammatic illustration of a prior art memory array comprising MRAM devices.
A first aspect of the present invention is described with reference to FIGS. 3-12. In referring to FIGS. 3-12, similar numbering will be used as was utilized above in describing the prior art of FIG. 1, where appropriate.
Referring initially to FIG. 3, a semiconductor construction 100 is illustrated in fragmentary view. Construction 100 comprises a substrate 14 and a conductive line 16. Additionally, construction 100 comprises layers 18, 20 and 22 formed over conductive line 16. Substrate 14, and lines 16,18, 20 and 22 can comprise the materials described above with reference to prior art FIG. 1.
A patterned masking material 102 is formed over layer 22. Masking material 102 can comprise, for example, photoresist, and can be formed into the shown pattern utilizing photolithographic processing.