Thin film magnetic head comprising insulating layer provided between core and coil and manufacturing method therefor

A method of manufacturing a thin film magnetic head comprising:

• (a) the step of forming a recording region comprising a pole layer and a gap layer on a lower core layer;
• (b) the step of forming an organic insulation underlying layer on the portion of the lower core layer, which is behind the recording region in the height direction;
• (c) the step of forming a coil layer and a coil insulation layer on the organic insulation underlying layer so that the coil insulation layer is contained in the pitch intervals of a conductor of the coil layer;
• and
• (d) the step of forming an insulation layer on the coil layer and the coil insulating layer, and then forming an upper core layer on the insulation layer.

A method of manufacturing a thin film magnetic head comprising:

• (a) the step of forming a recording region comprising a pole layer and a gap layer on a lower core layer;
• (e) the step of forming an inorganic insulation underlying layer in the region from the recording region to the lower core layer;
• (f) the step of forming an organic insulation underlying layer on the inorganic insulation underlying layer formed on the lower core layer;
• (c) the step of forming a coil layer and a coil insulation layer on the organic insulation underlying layer to locate in the pitch intervals of a conductor of the coil layer;
• and
• (d) the step of forming an insulation layer on the coil layer and the coil insulation layer, and then forming an upper core layer on the insulation layer.

A method of manufacturing a thin film magnetic head comprising:

• (a) the step of forming a recording region comprising a pole layer and a gap layer on a lower core layer;
• (b) the step of forming an organic insulation underlying layer on the portion of the lower core layer, which is behind the recording region in the height direction;
• (g) the step of forming an inorganic insulation underlying layer in the region raging from the recording region to the organic insulation underlying layer;
• (h) the step of forming a coil layer and a coil insulation layer on the inorganic insulation underlying layer so that the coil insulation layer is contained in the pitch intervals of a conductor of the coil layer;
• and
• (d) the step of forming an insulation layer on the coil layer and the coil insulating layer, and then forming an upper core layer on the insulation layer.

A method of manufacturing a thin film magnetic head comprising:

• (i) the step of forming an organic insulation underlying layer at a predetermined position on a lower core layer;
• (j) the step of forming a coil insulation layer on the lower core layer and the organic insulation underlying layer;
• (k) the step of forming a trench within a predetermined length from the surface of the coil insulating layer facing a recording medium in the height direction, and forming a recording region comprising a gap layer and a magnetic layer in the trench;
• (l) the step of forming coil forming grooves in the coil insulation layer on the organic insulation underlying layer, and filling the coil forming grooves with a conductive material to form a coil layer;
• and
• (m) the step of forming an insulation layer on the coil layer and the coil insulation layer and then forming an upper core layer on the insulation layer.

A method of manufacturing a thin film magnetic head comprising:

• (i) the step of forming an organic insulation underlying layer at a predetermined position on a lower core layer;
• (n) the step of forming an inorganic insulation underlying layer on the organic insulation underlying layer and the lower core layer;
• (o) the step of forming a coil insulation layer on the inorganic insulation underlying layer;
• (k) the step of forming a trench within a predetermined length from the surface of the coil insulation layer facing a recording medium in the height direction, and forming a recording region comprising a gap layer and a magnetic layer in the trench;
• (l) the step of forming coil forming grooves in the coil insulation layer on the organic insulation underlying layer, and filling the coil forming grooves with a conductive material to form a coil layer;
• and
• (m) the step of forming an insulation layer on the coil layer and the coil insulation layer and then forming an upper core layer on the insulation layer.

A method of manufacturing a thin film magnetic head comprising:

• (p) the step of forming an inorganic insulation underlying layer on the lower core layer;
• (q) the step of forming an organic insulation underlying layer at a predetermined position on the inorganic insulation underlying layer;
• (r) the step of forming a coil insulation layer on the inorganic insulation underlying layer and the organic insulation underlying layer;
• (k) the step of forming a trench within a predetermined length from the surface of the coil insulation layer facing a recording medium in the height direction, and forming a recording region comprising a gap layer and a magnetic layer in the trench;
• (l) the step of forming coil forming grooves in the coil insulation layer on the organic insulation underlying layer, and filling the coil forming grooves with a conductive material to form a coil layer;
• and
• (m) the step of forming an insulation layer on the coil layer and the coil insulation layer and then forming an upper core layer on the insulation layer.