Perpendicular magnetic recording head having main magnetic pole layer formed on high-flatness surface, and method of manufacturing the head

A method of manufacturing a perpendicular magnetic recording head, comprising the steps of:

• (a) forming an auxiliary magnetic pole layer of a magnetic material;
• (b) forming a connecting layer on said auxiliary magnetic pole layer at a position inward of an opposing surface of the head opposite to a recording medium, forming a coil layer on said auxiliary magnetic pole layer through an insulating undercoat layer over an area between said opposing surface and said connecting layer, and then filling an insulating layer on said coil layer;
• (c) polishing a surface of said insulating layer such that an upper surface of said insulating layer and an upper surface of said connecting layer are flattened flush with each other;
• (d) forming a resist layer on said insulating layer and said connecting layer, and forming in said resist layer a holed pattern having a hole space, of which inner width size in a direction of track width in at least said opposing surface gradually increases as the hole space departs farther away from said auxiliary magnetic pole layer;
• (e) forming a main magnetic pole layer in said holed pattern by plating, and removing said resist layer;
• and
• (f) forming a resist layer having a larger film thickness than said main magnetic pole layer to overlie from said main magnetic pole layer to said insulating layer, forming in said resist layer a holed pattern for a yoke layer, said holed pattern having a front end surface positioned inward of said opposing surface, said holed pattern being positioned on said main magnetic pole layer or on said insulating layer in an area extending from a rear end surface of said main magnetic pole layer in a height direction, forming said yoke layer in said holed pattern by plating, and then removing said resist layer.