Measuring module
AssigneeNanophotonics AG
InventorMichael Abraham
Life of this patent
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Abstract
The present invention relates to a measuring module, whose measuring device comprises a measuring head equipped with a miniaturized measuring unit, and a spatially separately arranged control and evaluation unit, and wherein the measuring head is arranged so as to be able to slide linearly by means of a sliding drive.
Claims5
measuring module for measuring the surface of wafers with a measuring device and a measuring table, which comprises a wafer accommodation equipped with a rotation drive, characterized in that the measuring device (11) comprises a measuring head (11a) fitted with a miniaturized measuring unit and a spatially separate control and evaluation unit (11b) and that the measuring head (1a) is arranged to be linearly movable by means of a sliding drive:
Dependencies are inferred from the claim text.