US 2003/0193626 A1 · Method of manufacturing array substrate for liquid crystal display device

Abstract

A method of manufacturing an array substrate for a liquid crystal display device includes the steps of forming a gate line, a gate pad and a gate electrode on a substrate, forming a gate insulating layer on the gate line, the gate electrode and the gate pad, forming an active layer on the gate insulating layer, forming an ohmic contact layer on the active layer, forming a data line, a data pad, and source and drain electrodes on the ohmic contact layer, forming a pixel electrode on the source and drain electrodes, the pixel electrode contacting the drain electrode, forming a first passivation layer on the substrate including the pixel electrode, forming a second passivation layer on the first passivation layer, the second passivation layer exposing the first passivation layer over the gate pad and the data pad, and patterning the first passivation layer exposed by the second passivation layer to expose the gate pad and the data pad.

Claims46

Dependent claims

A method of manufacturing an array substrate for a liquid crystal display device, comprising:

forming a gate line, a gate pad and a gate electrode on a substrate;
forming a gate insulating layer on the gate line, the gate electrode and the gate pad;
forming an active layer on the gate insulating layer;
forming an ohmic contact layer on the active layer;
forming a data line, a data pad, and source and drain electrodes on the ohmic contact layer;
forming a pixel electrode on the source and drain electrodes, the pixel electrode contacting the drain electrode;
forming a first passivation layer on the substrate including the pixel electrode;
forming a second passivation layer on the first passivation layer, the second passivation layer exposing the first passivation layer over the gate pad and the data pad;
and
patterning the first passivation layer exposed by the second passivation layer to expose the gate pad and the data pad.

7 more elements

Dependencies are inferred from the claim text.

Method of manufacturing array substrate for liquid crystal display device

Life of this patent

Method of manufacturing array substrate for liquid crystal display device

Life of this patent

Abstract

Claims46