Method of producing an ink jet recording head

A method of producing an ink jet recording head, comprising the steps of:

• (a) forming a nozzle communicating hole through which a pressurizing chamber is communicated with a nozzle opening, by anisotropic etching performed on both faces of a silicon single-crystal substrate;
• (b) after said through hole is formed, forming a recess which will serve as the pressurizing chamber, by half etching performed on one of the faces of said silicon single-crystal substrate;
• and
• (c) fixing an elastic plate to a face of said silicon single-crystal substrate in which said through hole and said recess are formed in the previous steps, said face being on the side of said recess which will serve as said pressurizing chamber, and fixing a nozzle plate to another face.

A method of producing an ink jet recording head, comprising the steps of:

• (a) forming a nozzle communicating hole through which a pressurizing chamber is communicated with a nozzle opening, by anisotropic etching performed on both faces of a silicon single-crystal substrate;
• (b) after said through hole is formed, forming a recess which will serve as the pressurizing chamber, by half etching performed on one of the faces of said silicon single-crystal substrate;
• (c) forming a recess for connection on a face opposing said nozzle opening, by half etching;
• and
• (d) fixing an elastic plate to a face of said silicon single-crystal substrate in-which said through hole and said recess are formed in the previous steps, said face being on the side of said recess which will serve as said pressurizing chamber, and fixing a nozzle plate to another face.

A method of producing an ink jet recording head, comprising the steps of:

• (a) forming a nozzle communicating hole through which a pressurizing chamber is communicated with a nozzle opening, by anisotropic etching performed on both faces of a silicon single-crystal substrate;
• (b) after said through hole is formed, forming a recess which will serve as the pressurizing chamber, by half etching performed on one of the faces of said silicon single-crystal substrate;
• (c) forming a recess through which said nozzle communicating hole is communicated with a common ink chamber, on a face opposing said nozzle opening, by half etching;
• and
• (d) fixing an elastic plate to a face of said silicon single-crystal substrate in which said through hole and said recess are formed in the previous steps, said face being on the side of said recess which will serve as said pressurizing chamber, and fixing a nozzle plate to another face.

A method of producing an ink jet recording head, comprising the steps of:

• (a) forming a through hole which serves as a nozzle communicating hole through which a pressurizing chamber is communicated with a nozzle opening, and forming a through hole which serves as a connection hole in a region which serves as a common ink chamber, by anisotropic etching performed on both faces of a silicon single-crystal substrate;
• (b) after said through holes are formed, forming a recess which serves as the pressurizing chamber and a first common ink chamber, by half etching performed on one of the faces of said silicon single-crystal substrate;
• (c) forming a recess which serves as a second common ink chamber, by half etching performed on another face of said silicon single-crystal substrate;
• and
• (d) fixing an elastic plate to a face of said silicon single-crystal substrate in which said through hole and said recess are formed in the previous steps, said face being on the side of said recess which serves as a first pressurizing chamber, and fixing a nozzle plate to another face.

An ink jet recording head comprising:

• a spacer having pressurizing chambers and an ink supply port formed by anisotropic etching of a silicon single-crystal substrate;
• a nozzle plate having nozzle openings at the same pitches as those of said pressurizing chambers, said nozzle plate being attached to one face of said spacer;
• and
• an elastic plate for selectively expanding and contracting said pressurizing chambers, said elastic plate being attached to another face of said spacer, wherein
• each of said pressurizing chambers is formed as a recess by half etching of said silicon single-crystal substrate, and a nozzle communicating hole is formed as a through hole by laser processing.

A method of producing an ink jet recording head, comprising the steps of:

• (a) forming a recess on one face of a silicon single-crystal substrate by anisotropic etching;
• (b) forming a through hole in a region of said recess by laser processing;
• and
• (c) fixing an elastic plate to a face on the side of an opening of said recess, and a nozzle plate to another face.

A method of producing an ink jet recording head, comprising the steps of:

• (a) forming a through hole at a position opposing a nozzle opening of a silicon single-crystal substrate, by laser processing;
• (b) forming a recess on one face of said silicon single-crystal substrate by anisotropic etching;
• and
• (c) fixing an elastic plate to a face on the side of an opening of said recess, and a nozzle plate to another face.

An ink jet recording head comprising:

• a passage unit comprising,
• a spacer forming a pressurizing chamber and a common ink chamber, and
• an elastic plate abutting against an end of a piezoelectric vibrating element;
• and
• a fixing substrate for fixing said piezoelectric vibrating elements thereto at regular pitches
• a frame for fixing said passage unit at a surface and said fixing substrate, said frame comprising,
• an opening at one end,
• a window through which the end of said piezoelectric vibrating element is exposed, at another end,
• an overhang portion which overhangs to a vicinity of said elastic plate, and
• a groove for injecting an adhesive formed on a wall face extending from a vicinity of said opening to said overhang portion, wherein said fixing substrate and said frame are fixed to each other by an adhesive.

A method of producing an ink jet recording head, comprising the steps of:

• fixing a passage unit in which a nozzle plate having a nozzle opening, a spacer forming a pressurizing chamber and a common ink chamber, and an elastic plate having a thick portion abutting against an end of a piezoelectric vibrating element are stacked, to an opening of a frame having an overhang portion which overhangs to a vicinity of said thick portion;
• inserting a vibrating element unit into said frame, said vibrating element unit being configured by fixing a plurality of piezoelectric vibrating elements operating in a longitudinal vibration mode to a fixing substrate;
• and
• injecting an adhesive into a groove formed in a region opposing said fixing substrate of said frame.

An ink jet recording head comprising:

• a piezoelectric vibrating element unit comprising,
• a plurality of piezoelectric vibrating elements, and
• a fixing substrate fixing said piezoelectric vibrating elements thereto at regular pitches;
• a passage unit comprising,
• a spacer forming a pressurizing chamber and a common ink chamber, and
• an elastic plate having a thick portion abutting against an end of each of said piezoelectric vibrating element;
• a frame to which said passage unit and said piezoelectric vibrating element unit are fixed while abutting said piezoelectric vibrating element against said thick portion;
• and
• a buffer member interposed between said frame and said passage unit, said buffer member being made of a material having a linear expansion coefficient between that of a linear expansion coefficient of said frame and a linear expansion coefficient of said passage unit.