Ion-source neutralization with a hot-filament cathode-neutralizer
AssigneeKaufman & Robinson, Inc.
InventorsHarold R. Kaufman, James R. Kahn, Viacheslav V. Zhurin
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AssigneeKaufman & Robinson, Inc.
InventorsHarold R. Kaufman, James R. Kahn, Viacheslav V. Zhurin
Estimating the term…
In accordance with one embodiment of the present invention, the ion-beam apparatus takes the form of a gridless ion source with a hot-filament cathode-neutralizer, in which the hot filament is heated with a current from the cathode-neutralizer heater. The cathode-neutralizer is connected to the negative terminal of the discharge supply for the gridless ion source. This connection is substantially isolated from ground (the potential of the surrounding vacuum chamber, which is usually at earth ground) and its potential is measured relative to ground. The heater current to the cathode-neutralizer is controlled by adjusting it so as to maintain this potential in a narrow operating range. This control can be manual or automatic.
A method for providing a current-neutralized ion beam, the method comprising the steps of:
A method for providing a current-neutralized ion beam, the method comprising the steps of:
A method for providing a current-neutralized ion beam, the method comprising the steps of:
Apparatus for providing a current-neutralized ion beam, said apparatus comprising:
Apparatus for providing a current-neutralized ion beam, said apparatus comprising:
Dependencies are inferred from the claim text.