Hermetic encapsulation of organic, electro-optical elements
AssigneeSchott AG
InventorsClemens Ottermann, Oliver Fritz, Dipl.-Phys. Dietrich Mund, Jorn Pommerehne
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Abstract
To achieve an increased service life of organic, electro-optical elements, the invention provides a process for producing them which comprises the steps of: providing a substrate (3), applying a first conductive layer (13), applying at least one layer (15) which includes at least one organic, electro-optical material, applying a second conductive layer (17), and the step of depositing at least one layer (7, 71, 72, . . . , 7N) with a vitreous structure.
Claims48
A process for producing an organic, electro-optical element (1), comprising the steps of:
- providing a substrate (3),
- applying a first conductive layer (13, 17),
- applying at least one layer (15) which includes at least one organic, electro-optical material,
- applying a second conductive layer (13, 17),
- which process comprises the step of
- depositing at least one layer (7, 71, 72, . . . 7N) with a vitreous structure.
The process as claimed in one of claims 1 to 7, wherein the step of depositing a layer (7, 71, 72, . . . 7N) with a vitreous structure comprises the step of deposition by means of plasma-enhanced chemical vapor deposition (PECVD), in particular the step of deposition by means of plasma impulse chemical vapor deposition (PICVD) and/or the step of sputtering on a layer (7, 71, 72, . . . 7N) with a vitreous structure.
Dependencies are inferred from the claim text.