US 2003/0193268 A1 · Piezoelectric actuator, liquid jetting head incorporating the same, and method of manufacturing the actuator and head

Abstract

A first common electrode to be fixed at a predetermined potential is formed on a vibration plate. The first common electrode has a first proximal portion and first branch portions extended from the proximal portion. A first piezoelectric layer is laminated on each of the first branch portions. A drive electrode is laminated on each first piezoelectric layer. A second piezoelectric layer is laminated on each drive electrode. A second common electrode to be fixed at the predetermined potential has a second proximal portion and second branch portions extended from the proximal portion such that each of the second branch portions is laminated on each second piezoelectric layer. A conduction member electrically connects the first proximal portion and the second proximal portion.

Claims6

Dependent claims

A piezoelectric actuator, comprising:

a vibration plate;
a first common electrode, formed on the vibration plate and to be fixed at a predetermined potential, the first common electrode having a first proximal portion and first branch portions extended from the proximal portion;
a first piezoelectric layer, laminated on each of the first branch portions;
a drive electrode, laminated on each first piezoelectric layer;
a second piezoelectric layer, laminated on each drive electrode;
a second common electrode, having a second proximal portion and second branch portions extended from the proximal portion such that each of the second branch portions is laminated on each second piezoelectric layer and to be fixed at the predetermined potential;
and
a conduction member, which electrically connects the first proximal portion and the second proximal portion.

5 more elements

A method of manufacturing a piezoelectric actuator, comprising steps of:

providing a vibration plate;
forming a first common electrode on the vibration plate so as to have a first proximal portion and first branch portions extended from the proximal portion;
laminating a first piezoelectric layer on each of the first branch portions;
laminating a drive electrode on each first piezoelectric layer;
laminating a second piezoelectric layer on each drive electrode;
forming a second common electrode having a second proximal portion and second branch portions extended from the proximal portion such that each of the second branch portions is laminated on each second piezoelectric layer, while the first common electrode and the second common electrode are insulated from each other;
and
connecting electrically the first proximal portion and the second proximal portion.

5 more elements

Dependencies are inferred from the claim text.

Piezoelectric actuator, liquid jetting head incorporating the same, and method of manufacturing the actuator and head

Life of this patent

Piezoelectric actuator, liquid jetting head incorporating the same, and method of manufacturing the actuator and head

Life of this patent

Abstract

Claims6