A method for making a flip chip in a leaded molded package is disclosed. In some embodiments, the method includes using a leadframe structure including a die attach region and leads. The die attach region includes depressions proximate the inner portions of the leads, and an aperture in the die attach region. A semiconductor die is mounted to the die attach region. A molding material passes through the aperture and covers the first surface of the semiconductor die and the die attach region.
Drawings
Claims48
A semiconductor package comprising:
(a) a semiconductor die including a first side and a second side, wherein the semiconductor die further includes a bond pad at the first side, the bond pad comprising an uneven surface;
(b) a leadframe structure comprising (i) a die attach region, and (ii) a plurality of leads extending away from the die attach region;
(c) a plurality of solder structures between the semiconductor die and the leadframe structure and coupling the die attach region to the semiconductor die;
(d) a depression formed in the leadframe structure, the depression being between the one of the solder structures in the plurality of solder structures, and one of the leads in the plurality of leads;
and
(e) a molding material covering the die attach region of the leadframe structure, the plurality of solder structures, and the first side of the semiconductor die.
3 more elements
A semiconductor package comprising:
(a) a semiconductor die including a first side and a second side;
(b) a leadframe structure comprising (i) a die attach region comprising an aperture that passes through the die attach region, and (ii) a plurality of leads extending away from the die attach region;
(c) a plurality of solder structures between the semiconductor die and the leadframe structure and coupling the die attach region to the semiconductor die;
(d) a depression in the leadframe structure, the depression being between the one of the solder structures in the plurality of leadframe structures, and one of the leads in the plurality of leads;
and
(e) a molding material covering the die attach region of the leadframe structure, the plurality of solder structures, and the first side of the semiconductor die, and wherein the molding material is also within the aperture of the die attach region.
3 more elements
A semiconductor package comprising:
(a) a semiconductor die including a first side and a second side, wherein the semiconductor die further includes a bond pad at the first side, the bond pad comprising an uneven surface;
(b) a leadframe structure comprising (i) a die attach region and an aperture in the die attach region, and (ii) a plurality of leads extending away from the die attach region;
(c) a plurality of solder structures between the semiconductor die and the leadframe structure and coupling the die attach region to the semiconductor die;
and
(d) a molding material covering the die attach region of the leadframe structure, the solder structure, and the first side of the semiconductor die, and wherein the molding material is also within the aperture.
2 more elements
A method for forming a semiconductor package, the method comprising:
(a) providing a plurality of leadframe structures in a leadframe carrier comprising a saw guide slot, wherein the leadframe carrier comprises a plurality of leadframe structures, each leadframe structure comprising (i) a die attach region, and (ii) a plurality of leads extending away from the die attach region;
(b) attaching semiconductor dies to the die attach regions, wherein a plurality of solder structures is between each semiconductor die and each die attach region;
(c) molding a molding material around at least a portion of each semiconductor die and at least a portion of each die attach region;
and
(d) cutting the leadframe carrier with a saw using the saw guide slot.
2 more elements
A method for forming a semiconductor package, the method comprising:
(a) providing a leadframe structure comprising (i) a die attach region comprising an aperture, and (ii) a plurality of leads extending away from the die attach region;
(b) attaching a semiconductor die to the die attach region, wherein the semiconductor die comprises a first side, a second side, and a bond pad having an uneven surface at the first side, and wherein a plurality of solder structures is between the semiconductor die and the die attach region;
(c) reflowing the plurality of solder structures;
and
(d) molding a molding material around at least a portion of the semiconductor die and at least a portion of each die attach region, wherein the molding material passes through the aperture in the die attach region.
2 more elements
A method for forming a semiconductor package, the method comprising:
(a) providing a leadframe structure comprising (i) a die attach region comprising an aperture, (ii) a plurality of leads extending away from the die attach region, and (iii) a plurality of depressions, each depression being proximate to an inner portion of a lead;
(b) attaching a semiconductor die to the die attach region, wherein the semiconductor die comprises a first side, a second side, and a bond pad at the first side, and wherein a plurality of solder structures is between the semiconductor die and the die attach region;
(c) reflowing the plurality of solder structures;
and
(d) molding a molding material around at least a portion of the semiconductor die and at least a portion of each die attach region, wherein the molding material passes through the aperture in the die attach region.
2 more elements
A method for forming a semiconductor package, the method comprising:
(a) providing a leadframe structure comprising (i) a die attach region, (ii) a plurality of leads extending away from the die attach region, and (iii) a plurality of depressions, each depression being proximate to an inner portion of a lead in the plurality of leads;
(b) attaching a semiconductor die to the die attach region, wherein the semiconductor die comprises a first side, a second side, and a bond pad having an uneven surface at the first side, and wherein a plurality of solder structures is between the semiconductor die and the die attach region;
(c) reflowing the plurality of solder structures;
and
(d) molding a molding material around at least a portion of the semiconductor die and at least a portion of each die attach region.
On different surfaces: bump connectors and die-attach connectors
Life of this patent
Term end not estimated
Priority claimedParent application 60/373,370
Application filedUS 10/413,668
Published
Assigned to Fairchild Semiconductor Corporationassignment of assignor's interest
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Assigned to Semiconductor Components Industries, LLCassignment of assignor's interest
Assigned to Fairchild Semiconductor Corporationrelease of security interest
Assigned to Deutsche Bank AG New York Branch, AS Collateral Agentsecurity interest
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Description7,804 words
Summary1,652 words
#There are a number of different types of semiconductor packages. One type of semiconductor package is called a flip chip in a leaded molded package (FLMP). This package is described in detail in U.S. patent application Ser. No. 09/464,885, entitled “Flip Chip in Molded Lead Package & Method of Manufacture Thereof”, by Rajeev Joshi, filed on Dec. 16, 1999. The flip chip in a leaded molded package includes a leadframe structure that has a die attach pad and leads that extend away from the die attach pad. The die attach pad is coupled to the front side of a semiconductor die with solder. A molding material covers the die attach pad and the front side of the semiconductor die, while the back side of the semiconductor die is exposed through the molding material. The leads extend laterally away from the molding material and are substantially co-planar with the back side of the semiconductor die and a surface of the molding material. The front side of the semiconductor die may correspond to the gate region and the source region of a MOSFET (metal oxide semiconductor field effect transistor) in the semiconductor die. The back side of the semiconductor die may correspond to the drain region of the MOSFET. When the semiconductor package is mounted to a circuit substrate, the back side of the die and the leads are connected to conductive lands on the circuit substrate with solder. The circuit substrate may be a printed circuit board.
#The above-described semiconductor package has a number of advantages. First, because there is a substantially direct electrical connection between the back side of the semiconductor die and the circuit substrate, and because there are short, low-resistance conductive paths between the source and gate regions in the semiconductor die, and the circuit substrate, the die package resistance is nearly eliminated, allowing for the industry's lowest RDS(ON) for the same package footprint. RDS(ON) is the on-resistance that is associated with turning a MOSFET in the die package on from an off-state. Second, the above-described semiconductor package is thin. For example, compared to a conventional wire bonded SOIC-8 package, which is about 1.6 mm tall, a flip chip in a leaded molded package can have a height of less than about 1.0 mm. The flip chip in a leaded molded package can have the same or better electrical and thermal performance, while being smaller than a standard SOIC-8 package. Thin semiconductor packages are especially desirable for small portable electronic devices such as wireless phones and laptop computers.
#While the above-described semiconductor package has a number of advantages, a number of improvements could be made. When mass producing semiconductor packages of the type described above, a number of problems can occur. The problems include, for example, silicon cracks that form because of an uneven die standoff from the die attach region of the leadframe structure, moisture seepage into the semiconductor package, delamination between the leadframe structure and the molding material, and molding material bleed on an exposed die surface and leads (which can hinder the package from functioning efficiently or potentially fail during device applications). Other problems include poor solder adhesion between the circuit board bonding pads and the semiconductor die and uneven cutting during the singulation process.
Brief description of the drawings20 figures
#FIG. 1 shows a flowchart illustrating a method according to an embodiment of the invention.
#FIG. 2 shows a side cross-sectional view of a flip chip in leaded molded package mounted on a circuit substrate.
#FIG. 3(a) shows a perspective view of a leadframe structure according to an embodiment of the invention.
Detailed description5,778 words
#Embodiments of the invention are directed to semiconductor packages and methods for making semiconductor packages. Embodiments of the invention can be applied to semiconductor packages with various pinouts such as 6, 8, etc. leads, while employing single sided molding technology. In some embodiments, the packages may be “single-sided” rather than semiconductor packages that are “double-sided”. Single-sided semiconductor packages have molding material at one side of the die, while double-sided packages have molding material at both sides of the die.
#Embodiments of the invention have a low package profile. Embodiments of the invention also provide a small package footprint, while increasing the die to package ratio for a given footprint, which is not possible for a wire-bonded type package. Also, in embodiments of the invention, the back side of the semiconductor die is exposed through the molding material in the package, thus improving heat dissipation to the underlying circuit substrate (as compared to a package where a molding material covers the back side).
#FIG. 1 shows a flowchart illustrating an exemplary process flow according to an embodiment of the invention. Each step in the flowchart is described in further detail below.