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US 2003/0193030 A1Published application
Position sensor for ultraviolet and deep ultraviolet beams
AssigneeStar Tech Instruments, Inc.
InventorsWilliam C. Fricke, Michael Ganopoulos
Life of this patent
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Abstract
A position sensor for ultraviolet beams includes a beam positioning member for directing an ultraviolet beam along a path; a downconverter member for converting the beam to visible light; a position sensing member for sensing position of visible light thereon; and relay optics for directing the visible light to the position sensing member; wherein the position sensing member is communicated with the beam positioning member for conveying information regarding position of the visible light to the beam positioning member.
Claims3
A position sensor for ultraviolet beams, comprising:
- a beam positioning member for directing an ultraviolet beam along a path;
- a downconverter member for converting the beam to visible light;
- a position sensing member for sensing position of visible light thereon;
- and
- relay optics for directing the visible light to the position sensing member;
- wherein the position sensing member is communicated with the beam positioning member for conveying information regarding position of the visible light to the beam positioning member.
3 more elements
Dependencies are inferred from the claim text.