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US 2003/0193025 A1Published application
Electron microscope, method for operating the same, and computer-readable medium
AssigneeKeyence Corporation
InventorShigenori Takagi
Life of this patent
Estimating the term…
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AssigneeKeyence Corporation
InventorShigenori Takagi
Estimating the term…
In an operation of an electron microscope, at least a spot size of an electron beam on a specimen, an acceleration voltage, a detector type, a specimen position, and an observation magnification are set as a predetermined image observation condition and an observation image is picked up under the predetermined image observation condition. Different image observation conditions are automatically set based on the observation image. A plurality of observation images are picked up based on the setup image observation conditions. The plurality of picked-up observation images are simultaneously displayed on a second display section. A desired observation image is selected from among the observation images displayed on the second display section. The selected observation image is displayed on a first display section on an enlarged scale.
An electron microscope for picking up an observation image of a specimen based on an image observation condition, the electron microscope comprising:
A method for operating an electron microscope which picks up an observation image of a specimen based on an image observation condition, the method comprising:
A method for operating an electron microscope which picks up an observation image of a specimen based on an image observation condition, the method comprising:
A method for operating an electron microscope which picks up an observation image of a specimen based on an image observation condition, the method comprising:
A method for operating an electron microscope which picks up an observation image of a specimen based on an image observation condition, the method comprising:
A computer-readable medium including a program executable on a computer for operating an electron microscope which picks up an observation image of a specimen based on an image observation condition, said program comprising instructions having:
Dependencies are inferred from the claim text.
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From the US filing history. Foreign family members aren’t listed.
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Electron or ion microscopes; Electron or ion diffraction tubes: with scanning beams
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging: treatment of data
Electric discharge tubes or discharge lamps
Term end not estimated
1. Field of the Invention
This invention relates to an electron microscope such as a scanning electron microscope, a transmission electron microscope, etc., a method for operating the electron microscope, and a computer-readable medium.
2. Description of the Related Art
FIG. 1 is a block diagram to show the configuration of a scanning electron microscope according to one embodiment of the invention;
FIG. 2 is an image drawing to show a menu screen of a scanning electron microscope operation program according to one embodiment of the invention;
FIG. 3 is a flowchart to show steps of image observation according to an auto observation mode of an electron microscope operation method according to one embodiment of the invention;
Referring now to the accompanying drawings, there is shown a preferred embodiment of the invention. However, it is to be understood that the following embodiment is illustrative for an electron microscope, an electron microscope operation method, an electron microscope operation program, and a computer-readable medium to embody the technical philosophy of the invention and that the invention does not limit the electron microscope, the electron microscope operation method, the electron microscope operation program, and the computer-readable medium to the following.
It is also to be understood that the specification does not limit the members defined in the appended claims to the members in the embodiment. The sizes of members shown in the accompanying drawings, their positional relationship, and the like may be exaggerated to clarify the description.
In the specification, an electron microscope, a computer, and other peripheral machines of a printer, etc., are electrically connected, for example, as serial connection or parallel connection of IEEE1394, RS-232C, RS-422, USB, etc., or through a network of 10BASE-T, 100BASE-TX, etc., for conducting communications. The connection is not limited to physical connection using wires and may be wireless connection using radio waves, infrared rays, optical communications, etc., such as wireless LAN, Bluetooth, etc. Further, a memory card, a magnetic disk, an optical disk, a magneto-optical disk, semiconductor memory, etc., can be used as a record medium for storing data of observation images, etc.