Gas processing appauratus, gas processing method and integrated valve unit for gas processing apparatus
AssigneeTokyo Electron Limited
InventorsHayashi Otsuki, Yutaka Miura
Life of this patent
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Abstract
A process gas line (255) for carrying WF6 gas for nucleation, a process gas line (257) for carrying WF6 gas for film deposition after nucleation are joined at a single joint (280) to a carrier gas line (256). A gas line (271) is connected to the joint (280) to carry a mixed gas of the carrier gas and WF6 gas to a processing chamber defined by a processing vessel. Sections of the carrier gas line (256) and the gas line (271) extending on the opposite sides of the joint (280) extend along a straight line, and the process gas lines (255, 257) are perpendicular to the gas line (271).
Claims16
An integrated valve unit to be placed in a process gas line included in a gas processing apparatus including a processing vessel capable of processing a substrate in the processing chamber by using a process gas supplied through the process gas line into the processing chamber, said integrated valve unit comprising:
- a base block provided with a valve bore and first and second gas lines opening into the valve bore;
- a valve element fitted in the valve bore of the base block so as to be movable;
- and
- an actuator that drives the valve element.
A gas processing apparatus comprising:
- a first gas line that supplies a process gas;
- a second gas line connected to the first gas line at a joint to supply a carrier gas for adjusting process gas concentration;
- a processing vessel in which a substrate is subjected to a predetermined gas process;
- and
- a third gas line that guides a mixed gas of the process gas and the carrier gas from the joint into the processing vessel;
- wherein the respective axes of the first and the third gas line are substantially aligned, and the axis of the second gas line is inclined at an angle to the axis of the third gas line.
A gas processing apparatus comprising:
- first second and third gas lines connected at a joint, wherein the first gas line supplies a first process gas, the second gas line supplies a second process gas, and the third gas line supplies a carrier gas that carries either the first or the second process gas;
- a processing vessel in which a substrate is subjected to a predetermined gas process;
- and
- a fourth gas line that guides a mixed gas of the carrier gas and either the first or the second process gas from the joint into the processing vessel;
- wherein the respective axes of the third and the fourth gas line are substantially aligned in the vicinity of the joint, and the respective axes of the first and the second gas line are inclined at angles, respectively, to the axis of the third gas line.
A gas processing method comprising the steps of:
- preparing a gas processing apparatus including a process gas line that supplying a process gas, a carrier gas line that supplies a carrier gas connected to the process gas line at a joint, and a processing vessel into which a mixed gas of the process gas and the carrier gas is supplied;
- supplying the process gas through the process gas line, and supplying the carrier gas having a molecular weight of 30 or below through the carrier gas line to supply a mixed gas of the process gas and the carrier gas into the processing vessel;
- and
- processing a substrate placed in the processing chamber by a gas process using the process gas.
A gas processing apparatus comprising:
- a process gas line that supplies a process gas;
- a carrier gas line that supplies a carrier gas for carrying the process gas, the carrier gas line being connected to the process gas line at a joint;
- a processing vessel into which a mixed gas of the process gas and the carrier gas is supplied and in which a substrate is subjected to a predetermined gas process using the process gas;
- a open-close valve placed in the process gas line at a position upstream of the joint;
- wherein a distance between the joint and the open-close valve and a sectional area of the process gas line are so determined that an amount of the process gas that flows out from the process gas line after the open-close valve has been closed is not greater than a predetermined value.
Dependencies are inferred from the claim text.