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US 2003/0192567 A1Published application
Method of making foreign matter harmless
AssigneeNone recorded
InventorsYoshihiro Koizumi, Katsuhide Tsuchiya
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AssigneeNone recorded
InventorsYoshihiro Koizumi, Katsuhide Tsuchiya
Estimating the term…
A main objective of the present invention is to provide a method of making a foreign matter harmless which can make the foreign matter, after attaching a pellicle, existing on a transmitting region of a reticle with a pellicle harmless, under pellicle attached condition. For attaining the above-described objective, the present invention provides a method of making a foreign matter harmless wherein a foreign matter existing on a transmitting region of a reticle with a pellicle is irradiated with laser, via the pellicle membrane to make the foreign matter harmless.
A method of making a foreign matter harmless, wherein a foreign matter existing on a transmitting region of a reticle with a pellicle is irradiated with laser, via the pellicle membrane to make the foreign matter harmless.
Dependencies are inferred from the claim text.
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No related US applications are recorded in the indexed filing history.
Backward citations are indexed for grants only.
Preparation processes not covered by groups G03F1/20 - G03F1/50: auxiliary processes, e.g. cleaning or inspecting
Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof: characterised by the frames, e.g. structure or…
Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus: cleaning, i.e. actively…
Construction of apparatus, e.g. environment aspects, hygiene aspects or materials: optical system protection, e.g. pellicles or removable covers…
Term end not estimated
1) Field of the Invention
The present invention relates to a method of making a foreign matter harmless which enables making a foreign matter harmless existing inside a reticle with a pellicle, without peeling off the pellicle.
2) Description of the Related Art
FIG. 1 is a schematic sectional view of a reticle with a pellicle.
The method of making a foreign matter harmless and a method for manufacturing reticle by the method of making a foreign matter harmless, of the present invention, will be explained below.
The method of making a foreign matter harmless of the present invention is such that a foreign matter existing on a transmitting region of a reticle with a pellicle is irradiated with laser, via the pellicle membrane to make the foreign matter harmless.
Here, the transmitting region of a reticle indicates a region on which a shading layer is not formed and transmits light in transferring patterns onto a wafer using a reticle.