Method for assembling micro structures and related apparatus
AssigneeSimon Fraser University
InventorRobert W. Johnstone
Life of this patent
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Abstract
A method for making three-dimensional structures comprises providing a plurality of components, each of which is moveably coupled to a substrate. The components may be pivotally coupled to the substrate by one or more micromachined hinges. The components are moved using electrostatic forces which lift the components from the surface of the substrate. The components may then be moved further by providing electrostatic forces between components. Two or more components may engage with one another to provide a three-dimensional structure.
Claims50
A method for making a three-dimensional structure, the method comprising:
- providing a first component which is moveably coupled to a substrate;
- moving the first component relative to the substrate by applying a first electrostatic force to the first component;
- and
- engaging a second component with the first component, the second component supporting the first component in a desired orientation relative to the substrate.
A method for making a three-dimensional structure, the method comprising:
- providing a plurality of components hingedly coupled to a substrate;
- pivoting the components into positions in which the components can be inter-engaged by applying electrostatic forces to the components;
- and
- engaging the components with one another to provide a three-dimensional structure.
A method for making a three-dimensional structure, the method comprising:
- providing a first component pivotally coupled to a substrate and a brace component pivotally coupled to the substrate;
- applying a first electrostatic force to the first component to pivot the first component about a first axis;
- applying a second electrostatic force to the brace component to pivot the brace component about a second axis;
- and
- applying a third electrostatic force between the first component and the brace component, the third electrostatic force attracting the brace component toward the first component, further pivoting the brace component about the second axis until the brace component engages and supports the first component in a substantially upright orientation.
An electrostatically erectable three-dimensional structure comprising:
- a first component pivotally mounted to a substrate about a first axis;
- a first conductive connection to the first component;
- a second component pivotally mounted to the substrate about a second axis;
- a second conductive connection to the second component;
- at least one voltage source,
- wherein the at least one voltage source is connectable to the first and second conductive connections to impart first electrostatic forces on the first and second components, the first electrostatic forces causing the first and second components to pivot relative to the substrate and wherein the at least one voltage source is connectable to the first and second conductive connections to impart second electrostatic forces between the first and second components, the second electrostatic forces causing the second component to pivot into a position where the second component engages and supports the first component in a desired orientation relative to the substrate.
Dependencies are inferred from the claim text.