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US 2003/0192176 A1Published application
Re-assembly process for MEMS structures
AssigneeFormFactor, Inc.
InventorsBenjamin N. Eldridge, Gaetan L. Mathieu
Life of this patent
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Abstract
Methods of fabricating an array of aligned microstructures on a substrate are disclosed. The microstructures may be spring contacts or other microelements. The methods disclosed include construction of an alignment substrate, alignment of die elements with the alignment substrate, and fixation of the aligned die elements to a backing substrate.
Claims36
A method for constructing an array of microstructures comprising:
- providing a substrate having a plurality of substrate guide marks and a plurality of microstructures;
- separating said substrate into a plurality of dice each having at least one of said substrate guide marks;
- providing a master substrate having a plurality of master guide marks;
- and
- aligning alignment members with master guide marks and corresponding substrate guide marks to provide an array of dice at predetermined locations.
2 more elements
An array of microstructures comprising:
- a plurality of tested and functional dice each having a microstructure and a substrate guide mark thereon;
- a master having a plurality of master guide marks;
- and
- alignment members in alignment with said master guide marks and corresponding substrate guide marks to provide an array of dice at predetermined locations.
1 more element
Dependencies are inferred from the claim text.