Back to results
US 2003/0191333 A1Published application
Trialkylindium preparation
AssigneeShipley Company, L.L.C.
InventorsDeodatta Vinayak Shenai-Khatkhate, Michael Brendan Power, Ronald L. Dicarlo JR.
Life of this patent
Estimating the term…
Abstract
Trialkylindium compounds are prepared by reacting indium trihalide with a trialkylaluminum compound in the presence of a fluoride salt, wherein the molar ratio of the indium trihalide to the fluoride salt is at least 1:4.5. Such trialkylindium compounds are particularly suitable for use in metalorganic vapor phase epitaxy.
Claims10
A method of manufacturing trialkylindium compounds comprising the steps of:
- a) reacting a trihaloindium compound with a trialkylaluminum compound in an organic reaction solvent in the presence of a fluoride salt to form a reaction mixture, wherein the molar ratio of the trihaloindium compound to the fluoride salt is at least 1:4.5, and wherein the organic reaction solvent has a boiling point of 100° C. or greater;
- b) separating the organic reaction solvent from the reaction mixture;
- and
- c) extracting the trialkylindium compound using an extraction solvent.
1 more element
Dependencies are inferred from the claim text.