Composite conditioning tool
OwnerJoseph K. Soinventor
Life of this patent
Estimating the term…
Abstract
A conditioning tool is useful for treating the polishing surface of a polishing pad. The tool has a base for supporting conditioning materials. The base has an abrasive section for cutting a polishing surface of the polishing pad and a polymeric section for treating the polishing surface of the polishing pad. The polymeric section is operable in a first position with only the polymeric section in contact with the polishing surface of the polishing pad and operable in a second position with the abrasive section in contact with the polishing surface of the polishing pad.
Claims10
A conditioning tool useful for treating the polishing surface of a polishing pad, comprising:
- a base for supporting conditioning materials;
- the base having an abrasive section for cutting a polishing surface of the polishing pad;
- and a polymeric section for treating the polishing surface of the polishing pad, the polymeric section being operable in a first position with only the polymeric section in contact with the polishing surface of the polishing pad and operable in a second position with the abrasive section in contact with the polishing surface of the polishing pad.
A conditioning tool useful for treating the polishing surface of a polishing pad, comprising:
- a base for supporting conditioning materials;
- the base having an abrasive section for cutting a polishing surface of a polishing pad;
- and a polymeric section for treating the polishing surface of the polishing pad, the polymeric section being capable of movement and downward force independent of the abrasive section and being operable in a first position with only the polymeric section in contact with the polishing surface of the polishing pad and operable in a second position with the abrasive section in contact with the polishing surface of the polishing pad.
A method of treating the surface of a polishing pad with a conditioning tool comprising the steps of:
- treating the polishing pad with a polymeric section of the conditioning tool to treat a polishing surface of the polishing pad;
- manipulating the conditioning tool to engage an abrasive section of the conditioning tool;
- and
- conditioning the polishing pad with the abrasive section of the conditioning tool to provide the polishing surface of the polishing pad with a conditioned surface.
Dependencies are inferred from the claim text.