Semiconductor element comprising a sequence of layers for converting acoustic or thermal signal and electrical voltage changes into each other and method for producing the same
AssigneeInfineon Technologies AG
InventorsRobert Aigner, Lueder Elbrecht, Thomas Rainer Herzog, Stephan Marksteiner, Winfried Nessler
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Abstract
The layer sequence has a lower electrode (U), an upper electrode (O) and a layer (S) which is arranged between them and is piezoelectrical or pyroelectrical. An auxiliary layer (H) is arranged between the lower electrode (U) and the layer (S) and is used for homogeneously oriented growth of the layer (S) during the production process. The auxiliary layer (H) is preferably composed essentially of amorphous silicon, amorphous silicon oxide or amorphous silicon nitride.
Claims12
A semiconductor component having a layer sequence for conversion of acoustic or thermal signals and electrical voltage changes to one another
- in which the layer sequence has a lower electrode (U), an upper electrode (O) and a layer (S) which is arranged between them and is piezoelectrical or pyroelectrical, characterized in that
- an auxiliary layer (H) is arranged between the lower electrode (U) and the layer (S), is composed essentially of amorphous silicon or amorphous silicon oxide and is used for homogeneously oriented growth of the layer (S) during the production process.
A process for producing a semiconductor component having a layer sequence for conversion of acoustic or thermal signals and electrical voltage changes for one another
- in which a lower electrode (U), a layer (S) above it which is piezoelectrical or pyroelectrical, and an upper electrode (O) above the layer (S) are produced as parts of the layer sequence, characterized in that,
- before the layer (S) is produced, an auxiliary layer (H), which is composed essentially of amorphous silicon or amorphous silicon oxide, is produced above the lower electrode (U), such that this auxiliary layer (H) promotes homogeneously oriented growth of the layer (S).
Dependencies are inferred from the claim text.