Coating apparatus and method

A device for holding a substrate, the device comprising:

• a. an indexing member;
• b. a first motor for indexing the indexing member about a central axis;
• c. a plurality of substrate holders positioned at radial axes that extend radially outward from the central axis;
• and
• d. a plurality of gear mechanisms for rotating the substrate holders about the radial axes.

A device for holding a substrate, the device comprising:

• a. a rotation member rotatable about a central axis;
• b. a plurality of substrate mounts positioned on the rotation member, the substrate mounts being rotatable about second axes;
• and
• c. a drive arrangement for rotating the rotation member about a central axis and for rotating the substrate mounts about the second axes.

A method of applying a substantially uniform coating on a substrate comprising steps of:

• a. providing a device for holding a substrate, the device comprising:
• i) a rotation member rotatable about a central axis;
• ii) a plurality of substrate mounts positioned on the rotation member, the substrate mounts being rotatable about second axes;
• and
• iii) a drive arrangement for rotating the rotation member about the central axis and rotating the substrate mounts about the second axes;
• b. mounting the substrate onto the substrate mounts;
• c. providing at least one substrate coating station adjacent to the rotation member, the substrate coating station comprising a nozzle for application of the coating to the substrate;
• d. rotating the rotation member about a central axis to position one or more of the substrate mounts at the substrate coating station;
• e. supplying the coating through the nozzle;
• f. moving the nozzle of the coating station in a direction parallel to the substrate at a predetermined rate to apply a uniform coating on the substrate;
• and
• g. rotating the substrate mounts about second axes simultaneously with steps e) and f).