Back to results
US 2003/0189863 A1Published application
Short edge management in rule based OPC
AssigneeMentor Graphics Corporation
InventorsGeorge P. Lippincott, Kyohei Sakajiri, Laurence W. Grodd
Life of this patent
Estimating the term…
Abstract
The invention discloses a method and apparatus for modifying, as appropriate, the geometries of a polygon. Based on various attributes associated with the polygon and its surroundings, modification of the location of the edge segments may conditionally occur. Additionally, if these modifications occur, a method to minimize the introduction of short edges during the modification is provided.
Claims41
A method of performing process correction at a layer of an integrated circuit design comprising:
- determining a width of a polygon of said layer at an edge segment of said polygon;
- determining a spacing from said edge segment of said polygon to a neighboring feature in said layer;
- determining a length of said edge segment;
- and
- conditionally modifying said edge segment based at least in part on at least a selected one of said width, said length and said spacing determinations.
2 more elements
A method comprising:
- receiving information for a first edge segment;
- receiving information for a second edge segment, said second edge segment being adjacent and collinear to said first edge segment, and at least one of said first and said second edge segments not exceeding a length threshold;
- determining a first bias for said first edge segment;
- determining a second bias for said second edge segment;
- selecting one of said first determined bias and said second determined bias to apply to both of said first edge segment and said second edge segment.
2 more elements
A method comprising:
- receiving at least length and space information for a first edge segment;
- receiving at least length and space information for a second edge segment, said second edge segment being adjacent and collinear to said first edge segment, and said first edge segment having length less than a length threshold;
- determining a first bias for said first edge segment;
- determining a second bias for said second edge segment;
- and
- conditionally lengthening said first edge segment.
3 more elements
An apparatus comprising:
- a machine readable medium having stored therein a plurality of programming instructions designed to operate said apparatus to enable said apparatus to:
- determine a width of a polygon, of a layer of an integrated circuit, at an edge segment of said polygon;
- determine a spacing from said edge segment of said polygon to a neighboring feature in said layer;
- determine a length of said edge segment;
- and
- conditionally modify said edge segment based at least in part on at least a selected one of said width, said length and said spacing determinations;
- and
- a processor coupled to said machine readable medium to execute said plurality of programming instructions.
5 more elements
An apparatus comprising:
- a machine readable medium having stored therein a plurality of programming instructions designed to operate said apparatus to enable said apparatus to:
- receive information for a first edge segment;
- receive information for a second edge segment, said second edge segment being adjacent and collinear to said first edge segment, and at least one of said first and said second edge segments not exceeding a length threshold;
- determine a first bias for said first edge segment;
- determine a second bias for said second edge segment;
- select one of said first determined bias and said second determined bias to apply to both of said first edge segment and said second edge segment;
- and
- a processor coupled to said machine readable medium to execute said programming instructions.
5 more elements
An apparatus comprising:
- a machine readable medium having stored therein a plurality of programming instructions designed to operate said apparatus to enable said apparatus to:
- receive at least length and space information for a first edge segment;
- receive at least length and space information for a second edge segment, said second edge segment being adjacent and collinear to said first edge segment, and said first edge segment having length less than a length threshold;
- determine a first bias for said first edge segment;
- determine a second bias for said second edge segment;
- and
- conditionally lengthen said first edge segment
- a processor coupled to said machine readable medium to execute said programming instructions.
5 more elements
A machine accessible medium having stored therein a plurality of programming instructions designed to operate an apparatus to enable said apparatus to:
- determine a width of a polygon, of a layer of an integrated circuit, at an edge segment of said polygon;
- determine a spacing from said edge segment of said polygon to a neighboring feature in said layer;
- determine a length of said edge segment;
- and
- conditionally modify said edge segment based at least in part on at least a selected one of said width, said length and said spacing determinations.
2 more elements
A machine accessible medium having stored therein a plurality of programming instructions designed to operate an apparatus to enable said apparatus to:
- receive information for a first edge segment;
- receive information for a second edge segment, said second edge segment being adjacent and collinear to said first edge segment, and at least one of said first and said second edge segments not exceeding a length threshold;
- determine a first bias for said first edge segment;
- determine a second bias for said second edge segment;
- select one of said first determined bias and said second determined bias to apply to both of said first edge segment and said second edge segment.
2 more elements
A machine accessible medium having stored therein a plurality of programming instructions designed to operate an apparatus to enable said apparatus to:
- receive at least length and space information for a first edge segment;
- receive at least length and space information for a second edge segment, said second edge segment being adjacent and collinear to said first edge segment, and said first edge segment having length less than a length threshold;
- determine a first bias for said first edge segment;
- determine a second bias for said second edge segment;
- and
- conditionally lengthen said first edge segment.
3 more elements
Dependencies are inferred from the claim text.