Giant magnetoresistance (GMR) read head with reactive-ion-etch defined read width and fabrication process
AssigneeHitachi Global Storage Technologies Netherlands B.V.
InventorsTsann Lin, Daniele Mauri
Life of this patent
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AssigneeHitachi Global Storage Technologies Netherlands B.V.
InventorsTsann Lin, Daniele Mauri
Estimating the term…
The GMR read head includes a GMR read sensor and a longitudinal bias (LB) stack in a read region, and the GMR read sensor, the LB stack and a first conductor layer in two overlay regions. In its fabrication process, the GMR read sensor, the LB stack and the first conductor layer are sequentially deposited on a bottom gap layer. A monolayer photoresist is deposited, exposed and developed in order to open a read trench region for the definition of a read width, and RIE is then applied to remove the first conductor layer in the read trench region. After liftoff of the monolayer photoresist, bilayer photoresists are deposited, exposed and developed in order to mask the read and overlay regions, and a second conductor layer is deposited in two unmasked side regions. As a result, side reading is eliminated and a read width is sharply defined by RE.
A magnetic head including a giant magnetoresistance (GMR) read head including a plurality of films, comprising:
A magnetic head including a GMR read head, comprising:
A hard disk drive including a magnetic head that includes a GMR read head, comprising:
A method for fabricating a GMR read head portion of a magnetic head, comprising:
A magnetic head including a read head portion that is fabricated by a method comprising the steps of:
Dependencies are inferred from the claim text.