Antenna for producing uniform process rates
AssigneeLam Research Corporation
InventorsMark H. Wilcoxson, Andrew D. Bailey III
Life of this patent
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Abstract
An antenna arrangement for generating an electric field inside a process chamber through a window. Generally, the antenna arrangement comprises an outer loop, comprising a first outer loop turn disposed around an antenna axis, an inner loop, comprising a first inner loop turn disposed around the antenna axis, wherein the inner loop is closer to the antenna axis than the outer loop is to the antenna axis in each azimuthal direction, and a radial connector radially electrically connecting the outer loop to the inner loop, wherein the radial connector is placed a large distance from the window.
Claims19
An antenna arrangement for generating an electric field inside a process chamber through a window, said antenna arrangement comprising:
- an outer loop, comprising a first outer loop turn disposed around an antenna axis;
- an inner loop, comprising a first inner loop turn disposed around the antenna axis, wherein the inner loop turn is closer to the antenna axis than the first outer loop turn is to the antenna axis in each azimuthal direction;
- and
- a radial connector radially electrically connecting the outer loop to the inner loop, wherein the radial connector is placed a large distance from the window.
A plasma processing apparatus for processing a substrate, comprising:
- a process chamber in which a plasma is both ignited and sustained for said processing;
- a window forming a side of the process chamber configured to allow the passage of RF energy into the process chamber;
- and
- a multi-layered antenna adjacent to the window and configured to produce an electric field via RF energy inside said process chamber, comprising:
- an outer loop, comprising a first outer loop turn disposed around the antenna axis;
- an inner loop, comprising a first inner loop turn disposed around the antenna axis, wherein the inner loop is closer to the antenna axis than the outer loop is to the antenna axis in each azimuthal direction;
- and
- a radial connector radially electrically connecting the outer loop to the inner loop, wherein the radial connector is placed a large distance from the window.
A turn for forming an antenna, comprising
- a complete notched turn comprising a turn formed around an antenna axis and with a first end and a second end, wherein the first end is notched forming a first cantilever portion and wherein the second end is notched forming a second cantilever portion;
- a first electrical connector connected to the first cantilever portion;
- and
- a second electrical connector connected to the second cantilever portion, wherein the first electrical connector and the second electrical connector lie along a common radius passing through the antenna axis.
Dependencies are inferred from the claim text.