Method for detecting quantity variation of high purity liquid chemicals and devices to carry out the method
AssigneeNanmat Technology Co., Ltd.
InventorsChi-Hui Lin, Cheng-Jye Chu, Pai-Mou Lee, Goang-Cheng Chang
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Abstract
This invention relatives to a method for detecting quantity variation of high purity liquid chemicals by way of detecting capacitance variation to determine the liquid level of liquid chemicals. Meanwhile, the ratio of the area of the smallest electrode of the capacitor to the distance between the electrodes is adjusted to magnify the capacitance so that a very small variation can be observed clearly. This invention also discloses a device to carry out this method.
Claims10
A method for detecting quantity variation of high purity liquid chemicals, the method comprises the following acts of:
- (i) sensing capacitance of the high purity liquid chemicals in a device, wherein the device is designed by adjusting the area of the smallest capacitor electrode and the distance between electrodes to magnify the capacitance be sensed;
- (ii) digitizing the capacitance;
- and
- (iii) analyzing and analogizing the digital capacitance to determine the liquid level and the quantity variation of the liquid chemicals.
Dependencies are inferred from the claim text.