Support and organic electroluminescence element comprising the support
AssigneeKonica Corporation
InventorsTaketoshi Yamada, Hiroshi Kita
Life of this patent
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Abstract
Disclosed is a support which comprises a flexible substrate and provided thereon, one or two or more polymer layers and one or two or more sealing layers, wherein at least one of the polymer layers and the sealing layers is formed by a process comprising the steps of exciting a reactive gas at a space between opposed electrodes at atmospheric pressure or approximately atmospheric pressure by electric discharge to be in the plasma state, and exposing the flexible substrate, the polymer layer or the sealing layer to the reactive gas in the plasma state.
Claims13
A support comprising a flexible substrate and provided thereon, one or two or more polymer layers and one or two or more sealing layers, wherein at least one of the polymer layers and the sealing layers is formed by a process comprising the steps of exciting a reactive gas at a space between opposed electrodes at atmospheric pressure or approximately atmospheric pressure by electric discharge to be in the plasma state, and exposing the flexible substrate, the polymer layer, or the sealing layer to the reactive gas in the plasma state.
An organic electroluminescence element comprising a support, wherein the support comprises a flexible substrate and provided thereon, one or two or more polymer layers and one or two or more sealing layers, wherein at least one of the polymer layers and the sealing layers is formed by a process comprising the steps of exciting a reactive gas at a space between opposed electrodes at atmospheric pressure or approximately atmospheric pressure by discharge to be in the plasma state, and exposing the flexible substrate to the reactive gas in the plasma state.
A support comprising a substrate and provided thereon, at least two layers containing a metal oxide, a metal nitride or a metal nitride oxide, the two layers being different in carbon concentration, wherein at least one of the layers is formed by a process comprising the steps of exciting a reactive gas at a space between opposed electrodes at atmospheric pressure or approximately atmospheric pressure by electric discharge to be in the plasma state, and exposing the substrate or the layer on the substrate to the reactive gas in the plasma state.
Dependencies are inferred from the claim text.