Method and apparatus for actuation of a two-axis MEMS device using three actuation elements
AssigneeGlimmerglass Networks, Inc.
InventorsAndres Fernandez, William C. Dickson
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Abstract
Apparatus and methods are provided for driving a two-axis MEMS mirror using three non-contact actuation elements or electrodes. A differential bi-directional mirror control uses unipolar drive voltages biased at a suitable value. Transformation functions map two-axis tip-tilt commands to three actuation drive signals for selected electrode orientations and sizes.
Claims13
An apparatus with two axes of controllable bi-directional angular displacement comprising:
- a platform susceptible of reorientation around the two axes in response to actuation;
- first, second, and third actuation elements located in proximity to the platform to provide noncontact actuation to the platform;
- three control sources operative to provide independent control forces to the first, second and third actuation elements;
- and
- control means for mapping selected positions relative to the two axes of angular displacement to the three control forces.
A method for linearized control of an apparatus with two axes of controllable bi-directional angular displacement, the apparatus having a platform susceptible of reorientation around the two axes in response to actuation, three actuation elements located in proximity to the platform to provide noncontact actuation to the platform, three control sources operative to provide independent control forces to the three actuation elements, and control means for mapping selected positions relative to the two axes of angular displacement to the three control forces, the method comprising the steps of:
- selecting an angle of displacement of the platform;
- mapping the angle of displacement to angle commands for displacement around an x axis and a y axis;
- mapping the two angle commands according a specified mapping matrix from first and second controllable angles to three bias voltages for producing angle-inducing electrode voltage commands for use to control the first and second controllable angles;
- and
- applying said angle-inducing electrode voltage commands to said three control sources to vary axial displacement of the actuation elements over said first and second controllable angles.
Method for linearized control of an apparatus with two axes of controllable bi-directional angular displacement, the apparatus having a platform susceptible of reorientation around the two axes in response to actuation, three actuation elements located in proximity to the platform to provide noncontact actuation to the platform, three control sources operative to provide independent control forces to the three actuation elements, and control means for mapping selected positions relative to the two axes of angular displacement to the three control forces, the method comprising the steps of:
- selecting an angle of displacement of the platform;
- mapping the angle of displacement to angle commands for displacement around an x axis and a y axis;
- mapping the two angle commands according a specified mapping matrix from first and second controllable angles to three bias currents for producing angle-inducing electrode current commands for use to control the first and second controllable angles;
- and
- applying said angle-inducing electrode current commands to said three control sources to vary axial displacement of the actuation elements over said first and second controllable angles.
Dependencies are inferred from the claim text.