Imprint method and device

An imprint process, comprising the steps of:

• aligning a substrate, supported on a first support member, with a template, supported on a second support member,
• said substrate having at least one essentially plane surface provided with a moldable film,
• said template having at least one essentially plane surface provided with a relief pattern,
• said relief pattern facing said moldable film;
• arranging a sealing gasket between said substrate and said first support member, such that a pressure cavity is defined by said first support member, said substrate and said sealing gasket, and
• applying a static gas pressure to said pressure cavity, in order to provide a pressure between said substrate and said template, so as to form a pattern in said moldable film.

An imprint process, comprising the steps of:

• aligning a substrate, with a first and a second template,
• said substrate having first and second essentially plane surfaces, each surface being provided with a respective moldable film,
• said first and second templates each having at least one essentially plane surface, which is provided with a respective relief pattern, and
• each relief pattern one of said moldable films;
• said first and second templates being supported on first and second support members, respectively;
• arranging a respective sealing gasket between each of said first and second templates and said respective support member, such that a first and a second pressure cavity is defined by said respective support member, said respective template and said respective sealing gasket;
• and
• applying a static gas pressure to said first and second pressure cavities, in order to provide a pressure between said templates and said substrate, in order to form patterns in said first and second moldable films.

An imprint device, comprising:

• a first support member for receiving an essentially plane substrate, and
• a second support member arranged for receiving a first sealing gasket and an essentially plane template,
• wherein a surface area of said second support member, facing the first support member, said first sealing gasket encircling said surface area and the template define a pressure cavity, and
• wherein the device is arranged to press said first and second support members towards each other and to provide a static gas pressure within said pressure cavity.

An imprint device, comprising:

• a first support member for receiving an essentially plane template, and
• a second support member arranged for receiving a first sealing gasket and an essentially plane substrate,
• wherein a surface area of said second support member, facing the first support member, said first sealing gasket encircling said surface area and the substrate define a pressure cavity, and
• wherein the device is arranged to press said first and second support members towards each other and to provide a static gas pressure within said pressure cavity.

An imprint device, comprising:

• a first support member for receiving a first sealing gasket and a first essentially plane template,
• a second support member for receiving a second sealing gasket and a second essentially plane template
• wherein a First surface area of said first support member, facing the second support member, said first sealing gasket encircling said first surface area and the first template define a first pressure cavity,
• wherein a second surface area of said second support member, facing the first support member, said second sealing gasket encircling said second surface area and the second template define a second pressure cavity,
• wherein the device is arranged to press said first and second support members towards each other and to provide a static gas pressure within said first and second pressure cavities.