Under-bump-metallurgy layer
OwnerHo-Ming Tong, Chun-Chi Lee +4inventors
InventorsHo-Ming Tong, Chun-Chi Lee, Jen-Kuang Fang, Min-Lung Huang, Ching-Huei Su, Chao-Fu Weng
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OwnerHo-Ming Tong, Chun-Chi Lee +4inventors
InventorsHo-Ming Tong, Chun-Chi Lee, Jen-Kuang Fang, Min-Lung Huang, Ching-Huei Su, Chao-Fu Weng
Estimating the term…
An under-ball-metallurgy layer over a contact pad is provided. The contact pad and corresponding contact surface of the under-bump-metallurgy layer are made of copper. The under-ball-metallurgy layer is constructed from a stack of metallic layers selected from a group consisting of titanium/copper, titanium-tungsten alloy/copper, tantalum/copper, titanium/titanium-nitride compound/copper, tantalum/tantalum-nitride compound/copper, tantalum/nickel-vanadium alloy/copper, tantalum/nickel/copper, copper/nickel-vanadium alloy/copper, titanium/nickel/copper, copper/chromium-copper alloy/copper, or chromium-copper alloy/chromium/chromium-copper alloy/copper.
An under-ball-metallurgy layer over a contact pad, wherein the contact pad and corresponding contact surface of the under ball-metallurgy layer are both made from copper, the under-ball-metallurgy layer comprising:
An under-ball-metallurgy layer over a contact pad, wherein the contact pad and corresponding contact surface of the under-ball-metallurgy layer are both made from copper, the under-ball-metallurgy layer comprising:
An under-ball-metallurgy layer over a contact pad, wherein the contact pad and corresponding contact surface of the under-ball-metallurgy layer are both made from copper, the under-ball-metallurgy layer comprising:
An under-ball-metallurgy layer over a contact pad, wherein the contact pad and corresponding contact surface of the under ball-metallurgy layer are both made from copper, the under-ball-metallurgy layer comprising:
An under-ball-metallurgy layer over a contact pad, wherein the contact pad and corresponding contact surface of the under-ball-metallurgy layer are both made from copper, the under-ball-metallurgy layer comprising:
An under-ball-metallurgy layer over a contact pad, wherein the contact pad and corresponding contact surface of the under-ball-metallurgy layer are both made from copper, the under-ball-metallurgy layer comprising:
An under-ball-metallurgy layer over a contact pad, wherein the contact pad and corresponding contact surface of the under-ball-metallurgy layer are both made from copper, the under-ball-metallurgy layer comprising:
An under-ball-metallurgy layer over a contact pad, wherein the contact pad and corresponding contact surface of the under-ball-metallurgy layer are both made from copper, the under-ball-metallurgy layer comprising:
An under-ball-metallurgy layer over a contact pad, wherein the contact pad and corresponding contact surface of the under-ball-metallurgy layer are both made from copper, the under-ball-metallurgy layer comprising:
An under-ball-metallurgy layer over a contact pad, wherein the contact pad and corresponding contact surface of the under-ball-metallurgy layer are both made from copper, the under-ball-metallurgy layer comprising:
An under-ball-metallurgy layer over a contact pad, wherein the contact pad and corresponding contact surface of the under-ball-metallurgy layer are both made from copper, the under-ball metallurgy layer comprising:
Dependencies are inferred from the claim text.