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OwnerTakeshi Kamada, Hideo Torii +1inventors
InventorsTakeshi Kamada, Hideo Torii, Ryoichi Takayama
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A dielectric thin film element enables controlling of a crystal orientation of a dielectric thin film and optimization of a variety of characteristics such as electric characteristics. This dielectric thin film element (10) comprises a substrate (11), a first electrode (12) formed on the substrate (11), a dielectric thin film (13) formed on the first electrode (12) and a second electrode (14) formed on the dielectric thin film (13) and is fabricated with the substrate (11) being heated. A material having a predetermined thermal expansion coefficient is used as the material of the substrate (11), and a crystal orientation of the dielectric thin film (13) is controlled by the thermal expansion coefficient of the substrate (11).
A dielectric thin film element comprising a substrate, a first electrode formed on the substrate, a dielectric thin film formed on the first electrode and a second electrode formed on the dielectric thin film, which is fabricated with the substrate being heated, wherein
A dielectric thin film element comprising a substrate, a first electrode formed on the substrate, a dielectric thin film formed on the first electrode and a second electrode formed on the dielectric thin film, which is fabricated with the substrate being heated, wherein
Dependencies are inferred from the claim text.