Isolated frame caster
AssigneeNikon Corporation
InventorAndrew J. Hazelton
Life of this patent
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Abstract
Methods and apparatus for reducing the transmission of vibrations within a caster system that supports a stage apparatus with a reaction frame are disclosed. According to one aspect of the present invention, a caster system that support portions of a stage apparatus which has a reaction frame and a stage assembly includes a first caster component and at least a second caster component. The first caster component supports the stage assembly, while the second caster component supports the reaction frame and is vibrationally separated from the first caster component. The second caster component may be physically coupled to the first caster component to enable the first caster component, the second caster component, the reaction frame, and the stage assembly to be moved as a substantially single unit.
Claims28
A caster system, the caster system being arranged to support portions of a stage apparatus thereon, the stage apparatus including a reaction frame and a stage assembly, the reaction frame being arranged to absorb reaction forces associated with the stage assembly, the caster system comprising:
- a first caster component arranged to support the stage assembly;
- and
- a second caster component arranged to support the reaction frame, wherein the second caster component is vibrationally separated from the first caster component.
A caster system, the caster system being arranged to support portions of a stage apparatus thereon, the stage apparatus including a reaction frame and a stage assembly, the reaction frame being arranged to absorb reaction forces associated with the stage assembly, the caster system further being arranged to facilitate movement of the stage apparatus supported thereon, the caster system comprising:
- a first component, the first component being arranged to be coupled to the stage assembly;
- and
- a second component, the second component being arranged to be coupled to the reaction frame, the second component further being arranged to be vibrationally isolated from the first component to prevent at least one vibrational mode associated with the reaction frame from causing an affect in the first component.
An apparatus comprising:
- a stage assembly, the stage assembly including a motor and a table, the motor being arranged to cause the table to move, wherein when the motor causes the table to move, the motor generates a reaction force;
- a reaction frame, the reaction frame being coupled to the stage assembly, wherein the reaction force is arranged to be transmitted from the motor to the reaction frame;
- and
- a caster system, the caster system including a first caster component that is arranged to support the stage assembly and a second caster component that is arranged to support the reaction frame, the caster system being arranged to facilitate moving the stage assembly and the reaction frame as a substantially single unit, wherein the second caster component is arranged to be physically coupled to the first caster component and the second caster component is vibrationally isolated from the first caster component.
A method for positioning a stage apparatus, the stage apparatus including a reaction frame and a stage assembly, the method comprising:
- arranging a first caster component and a second caster component in a first orientation, the first caster component being arranged to support the stage assembly and the second caster component being arranged to support the reaction frame;
- moving the stage apparatus;
- and
- arranging the first caster component and the second caster component in a second orientation, wherein second caster component is vibrationally separated from the first caster component in the second orientation.
Dependencies are inferred from the claim text.