Back to results
US 2003/0189176 A1Published application
Method and device for generating euv radiation
OwnerBoris Chichkov, Andr?eacute; Egbertinventors
Life of this patent
Estimating the term…
Abstract
The invention relates to a method for generating EUV radiation. Laser pulses are directed onto photoelectric transducer means (10), which generate pulses of electrically charged particles (6) as a result of the action of the laser pulses. The electrically charged particles are accelerated in an electric field and directed onto a target (4), in such a way that the target generates a plasma, which emits EUV radiation, as a result of the action of the electrically charged particles.
Claims26
Method for the generation of UV radiation, especially EUV radiation,
- according to which laser pulses are used for the production of a plasma that emits UV radiation, especially EUV radiation,
- characterized in,
- that the laser pulses are directed onto photoelectric transducer means that under the effect of the laser pulses produce pulses of electrically charged particles, and
- that the electrically charged particles are accelerated in an electrical field and are directed upon a target such that under the effect of the electrically charged particles the target produces a plasma that emits UV radiation, especially EUV radiation.
1 more element
Device for the generation of UV radiation, especially EUV radiation,
- with a laser, which produces laser pulses for the production of a plasma that emits UV radiation, especially EUV radiation,
- characterized in,
- that the laser directs the laser pulses upon photoelectric transducer means that under the effect of the laser pulses produces pulses of electrically charged particles, and
- that means are provided for the production of an electrical field that accelerates the electrically charged particles and directs them upon a target such that under the effect of the electrically charged particles the target produces a plasma that emits UV radiation, especially EUV radiation.
1 more element
Dependencies are inferred from the claim text.