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US 2003/0189061 A1Published application
Container for photoresist liquid
AssigneeAicello Chemical Co., Ltd.
InventorsKeiji Kawai, Yoshiaki Ito
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AssigneeAicello Chemical Co., Ltd.
InventorsKeiji Kawai, Yoshiaki Ito
Estimating the term…
There is herein provided a container for high purity liquid chemicals, which never deteriorates the quality of a liquid content and which is easy to handle. A container for high purity liquid chemicals is characterized in that it is a container obtained by blow molding an inner layer, which consists of a high purity resin comprising at least one member selected from the group consisting of olefinic polymers of ethylene, propylene, butene-1, 4-methyl-pentene-1, hexene-1 or octene-1 and copolymers of ethylene and olefins other than ethylene; an intermediate layer of a solvent-barrier resin, which comprises at least one member selected from the group consisting of polyamides, polyvinyl alcohols, poly(ethylene-co-vinyl alcohols), polyesters and polyphenylene oxides; and an external layer consisting of a light-shielding substance-containing resin composition, that the container has a lowest absorbance for the whole layers, as determined at a wavelength of not more than 400 nm using a spectrophotometer, equal to not less than 2.0; that an absorptivity coefficient as determined at a wavelength of 400 nm or the absorbance at that wavelength for the whole layers of the container divided by the thickness of the layers, is equal to not less than 1.5 mm−1; and that an absorptivity coefficient as determined at a wavelength of 600 nm is equal to not more than 1.5 mm−1.
A container for high purity liquid chemicals, characterized in that it is a container obtained by blow molding an inner layer, which consists of a high purity resin comprising at least one member selected from the group consisting of olefinic polymers of ethylene, propylene, butene-1, 4-methyl-pentene-1, hexene-1 or octene-1 and copolymers of ethylene and olefins other than ethylene;
A method for discharging a high purity liquid chemical, comprising the steps of tightly accommodating, in a protective pressure container, an inner container from which one end of a liquid-discharge pipe is guided to the exterior of the inner container, while the other end of the pipe is inserted in the inner container down to the bottom thereof and which is filled with a high purity liquid chemical;
A method for discharging a high purity liquid chemical, comprising the steps of accommodating, in a protective container, an inner container from which one end of a liquid-discharge pipe is guided to the exterior of the inner container, while the other end of the pipe is inserted in the inner container down to the bottom thereof and which is filled with a high purity liquid chemical;
A method for discharging a high purity liquid chemical, comprising the steps of accommodating, in a protective container, an inner pressure container from which one end of a liquid-discharge pipe is guided to the exterior of the inner container, while the other end of the pipe is inserted in the inner container down to the bottom thereof and which is filled with a high purity liquid chemical;
Dependencies are inferred from the claim text.