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US 2003/0188830 A1Published application
Substrate support having barrier capable of detecting fluid leakage
AssigneeApplied Materials, Inc.
InventorsKadthala R. Narendrnath, Michael Douglas, Surinder Bedi
Life of this patent
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Abstract
A substrate support has a receiving surface capable of receiving a substrate during processing in a substrate processing chamber.. The substrate support has a pedestal having a conduit to circulate a heat transfer fluid therein. A barrier about the conduit includes a fluid detection material capable of detecting a leakage of the fluid from the conduit be changing an attribute, for example, an optical or electrical property.
Claims11
A substrate support comprising:
- a pedestal comprising a substrate receiving surface to receive the substrate;
- a conduit in the pedestal to circulate a fluid to the pedestal;
- and
- a barrier about the conduit, the barrier comprising a material capable of changing attributes upon exposure to fluid leaking out from the conduit.
1 more element
Dependencies are inferred from the claim text.