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AssigneesPermelec Electrode Ltd., Puretron Ltd.
InventorsTeruo Haibara, Kenichi Uemura, Masaaki Kato, Kuniaki Yamada, Yoshinori Nishiki, Tsuneto Furuta
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A functional water containing a fluorine-containing component obtained by electrolyzing an aqueous solution containing fluoride ion using electrodes having conductive diamonds, a method of producing the same, and a method and an apparatus of rinsing electronic parts using the functional water as a rinsing water. The fluorine-containing component produced by electrolyzing the fluoride ion using the conductive diamond, has stronger rinsing effect than that of a fluorine-containing component obtained by electrolyzing the fluoride ion itself before electrolysis or the fluoride ion using other electrodes. Therefore, an amount of hydrofluoric acid used can greatly be decreased.
A functional water comprising a fluorine-containing component obtained by electrolyzing an aqueous solution containing fluoride ions using electrodes having conductive diamonds.
A functional water comprising a fluorine-containing component obtained by electrolyzing an aqueous solution containing fluoride ions and sulfate ions using electrodes having conductive diamonds, and a sulfur-containing component.
A method of producing a functional water comprising:
An apparatus of producing a functional water comprising an electrolytic cell which is divided into at least an anode chamber for accommodating an anode having conductive diamonds and a cathode chamber by a separator, an aqueous solution containing fluoride ions being supplied in the anode chamber and electricity being passed between both electrodes, thereby producing the functional water containing fluorine-containing component in the anode chamber.
An apparatus of rinsing electronic parts comprising an electrolytic cell which is divided into at least an anode chamber for accommodating anode having conductive diamonds and a cathode chamber, an aqueous solution containing fluoride ions being supplied to the anode chamber, electricity being passed between both electrodes, thereby producing a functional water containing fluorine-containing component in the anode chamber, and means for jetting the rinsing water to the electronic parts or immersing the electronic parts in the rinsing water.
Dependencies are inferred from the claim text.